Used TEL / TOKYO ELECTRON Clean Track ACT 8 #9269230 for sale

ID: 9269230
System 2002 vintage.
TEL / TOKYO ELECTRON Clean Track ACT 8 is a high-performance photoresist equipment designed for precise and efficient patterning. The system utilizes high-performance photoresist, a special type of photo-sensitive material that yields a very finely detailed pattern when exposed to light. The photoresist is mounted on a specialized robotic wafer-handling unit, which can move wafers with accuracy and repeatability. The machine utilizes high-end optics, including a high-quality linearly polarized laser, enabling precise exposure of the photoresist. The laser exposure tool is aligned to ensure that precision patterns are generated. This precision aligns the asset for ultimate efficiency. The high-performance photoresist is prepared and applied to the stamper wafer using the model's robotic wafer-handling equipment. The robot's precise motion is capable of rapidly positioning each wafer, ensuring the desired pattern and/or geometry is generated. The robotic wafer handling system then transports the wafer to the exposure unit, which exposes the photoresist to the laser's light. The exposure causes the photoresist to harden in the shape of the desired pattern. Once the exposure is completed, the wafer is moved to the development machine, which uses hot water, or chemicals, to dissolve the unexposed photoresist and reveal the final pattern or geometry. This final step results in a highly-defined, precise wafer pattern that is ready for further processing. TEL Clean Track ACT 8 tool features a high-precision micro-precise alignment asset. It automatically adjusts the alignment of the exposure model, eliminating the need for time-consuming manual setups. This enables ultra-precise and repeatable patterning. The equipment incorporates a range of additional features, including a high-precision wafer alignment system for efficient and accurate wafer handling, auto-focus control to ensure precise exposure, and a unit monitor to provide real-time error detection and data logging. In total, TOKYO ELECTRON Clean Track ACT 8 machine provides a fast, precise, and efficient photoresist tool that can yield highly-accurate pattern. The asset is ideal for high-precision, precision-oriented process flows.
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