Used TUNG SHUNG 27MQ-E #194141 for sale

TUNG SHUNG 27MQ-E
Manufacturer
TUNG SHUNG
Model
27MQ-E
ID: 194141
Vintage: 1999
Developer 1999 vintage.
TUNG SHUNG 27MQ-E is a photoresist system used in semiconductor processing. It is designed to improve yield rates by reducing errors and enhancing process quality. The system works by exposing a layer of photoresist to light or other radiation sources, followed by a resulting change in the composition or properties of that layer. 27MQ-E utilizes a high resolution stepper to acquire and control the exposure to light or radiation, allowing for precise calibration and control. Its integrated illumination alignment allows for extremely accurate imaging of exposure targets on the photoresist layer. Additionally, the resolution of TUNG SHUNG 27MQ-E is 800nm, which ensures that exposure to light, or other radiation sources, is of high quality and accuracy. 27MQ-E also features substrate heating capabilities, which are used to ensure the photoresist effect can be achieved. This is done by raising the temperature of the substrate before exposure to a temperature of up to 450°C for one minute. When the substrate reaches the set-point temperature, the photoresist is then exposed. In addition to the intricate hardware setup, TUNG SHUNG 27MQ-E also has a software platform that works in tandem with the hardware to further enhance the results of exposure to the photoresist layer. This software platform allows for flexibly scheduling of exposures and tracking of results, including the optimization of exposure time, light intensity, photoresist flow rate, and other process parameters. It also allows for the easy recall of previous results and the creation of new recipes for future processes. Overall, 27MQ-E photoresist system is an excellent tool for the development of modern semiconductor manufacturing. With its easy-to-use hardware and powerful software platform, TUNG SHUNG 27MQ-E ensures that the photoresist process is carried out with utmost accuracy and precision, resulting in improved yield rates and process quality.
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