Used BOC EDWARDS Helios-S #9203025 for sale

BOC EDWARDS Helios-S is a flexible, high-performance rapid thermal processor (RTP) designed to improve the performance of semiconductor processes. It is capable of conducting a range of secure processes quickly and uniformly. It provides temperature uniformity of better than ±1°C across the entire wafer, offering reliable and cost-effective performance. Helios-S is designed for small-scale research applications and high-volume production. It enables precision thermal processing over a range from 25 to 1200°C. It offers excellent temperature uniformity, uniform atmospheres and exceptional stability for an homogenous temperature profile, allowing for improved process consistency and repeatability. It uses advanced variations of the conventional rapid thermal anneal (RTA) process, allowing for high-throughput manufacturing processes. The processor features fast rise & fall rates, allowing for uniform and rapid changes in temperatures. This results in improved precision and uniformity, allowing for better device performance and smaller die sizes. BOC EDWARDS Helios-S includes both vertical and horizontal tube configurations to accommodate a variety of process requirements. It also supports single-sided and multi-sided processing of up to 300mm wafers. It utilizes a conventional hybrid gas delivery equipment to provide the desired flow of process and inert gases. Helios-S utilizes a custom-designed automation control system that is networkable to multiple processors, allowing for flexible process parameters. Additionally, the unit includes control capabilities for high-frequency device characterization tools, allowing for improved process performance. BOC EDWARDS Helios-S is designed for convenient and reliable operation. It utilizes user-friendly software, allowing users to quickly configure and operate the machine. It offers convenient data logging capabilities, allowing users to change setpoints and view log values remotely. Additionally, the processor includes built-in process control and device verification capabilities, ensuring repeatable performance. In summary, Helios-S is a advanced rapid thermal processor capable of secure and high-throughput processing across a range of temperatures. It offers excellent temperature uniformity, uniform atmospheres, and exceptional stability for an homogenous temperature profile for improved process consistency and repeatability. Additionally, it features a convenient automation control tool and user-friendly software for convenient and reliable operation.