Used BOC EDWARDS Helios #9203031 for sale

ID: 9203031
Vintage: 2003
Gas abatement scrubber system 2003 vintage.
BOC EDWARDS Helios is a rapid thermal processor, designed for the rapid, repeatable processing of substrates in research, development and production applications for the semiconductor, optoelectronic, photovoltaic, solar cell, composite material and medical device industries. It offers rapid thermal annealing, curing and other material processing solutions on a range of substrates. It can be used in conjunction with a wide variety of deposition tools such as sputter ion plating and organic chemical vapor deposition (oCVD) for process optimization. Helios has two standard heated input chambers, with optional third and fourth chambers for multi-chamber systems. It can handle up to four samples simultaneously and has a maximum temperature of 1000°C, depending on the application. These chambers have a capacity of up to 20mm in diameter and 10mm in height. The sample holders within the chambers provide a degree of flexibility and improve reproducibility of results. The process controls on BOC EDWARDS Helios are very sophisticated. It has an advanced PID control system which allows for accurate temperature control, for a range of temperatures from 50°C to 1000°C. It also features an advanced programmable ramp rate control, which allows users to create pre-defined ramp rates on the vertical axis for a consistent process result. The heaters are solid state with an array of sensors for accurate control and a robust digital communications link for network integration. Helios has full control over the process chamber environment and process parameters, enabling users to precisely control the thermal process parameters such as temperature, oxygen-controlled atmosphere, pressure and vacuum. The control system also offers the ability to control gas flows and monitor concentrations which can be set to levels suitable for dielectric and other material deposition. BOC EDWARDS Helios has good safety features which comply with industry safety standards. It has temperature and pressure relief valves, over-temperature protection cut-outs and explosion-proof enclosures. It also has programmable time delays and a variety of safety settings which can be set in order to comply with local safety regulations. Helios also offers a user-friendly graphical user interface (GUI) for easy setup and operation. Overall, BOC EDWARDS Helios is an advanced and highly flexible rapid thermal processor, capable of carrying out a wide range of thermal processes on a variety of substrates. It has good process control technology which allows for precise temperature and process parameter control, as well as a comprehensive safety system. It can be used in combination with other process tools in order to optimize the process and ensure repeatable, consistent results.
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