Used EATON NOVA / AXCELIS Reliance 850 #191216 for sale

EATON NOVA / AXCELIS Reliance 850
ID: 191216
Wafer Size: 8"
Vintage: 1997
Rapid thermal annealer, 8" 1997 vintage.
EATON NOVA / AXCELIS Reliance 850 is an advanced rapid thermal processor designed for high-precision and high-speed thermal processing in the semiconductor industry. It is the most advanced technology on the market that ensures superior repeatability and unmatched precision. AXCELIS Reliance 850 provides users with a maximum of reliable thermal wafer processing control that produce fewer defects, an improved bottom line, and greater yields. EATON NOVA Reliance 850 is designed to deliver precise and consistent thermal processing while eliminating errors caused by user control. The processor utilizes a control algorithm to continuously monitor the real-time application and continuously adjust the chamber's temperature in order to compensate for any variations that may occur during the process. This capability allows for more repeatable and more consistent results with fewer defects. The processor is also capable of being adjusted to meet the user's exact specifications with a multitude of customizable options. For example, it can be set to process any wafer type, at a range of temperatures, and for a range of process times. This makes it an ideal solution for complex production or critical process flows. Reliance 850 also offers unmatched precision. It features pulse modulation heating technology that allows it to reach exact temperatures quickly and accurately. It also has a higher level of control than traditional rapid thermal processors, which ensures it will reach the exact temperature and stay there, reducing errors to a minimum. Additionally, the processor is capable of providing real-time feedback on the temperature of the heater or gas lines and the actual wafer temperature, thus allowing the user to adjust the temperature when necessary. EATON NOVA / AXCELIS Reliance 850 also brings unmatched performance to the user. The processor allows for rapid thermal processing times, reducing the risk of thermal oxide defects and improving yield. Additionally, it has an advanced predictive model that can anticipate the optimal time for each step of the thermal process, allowing for process times that are faster than ever before. Finally, AXCELIS Reliance 850 comes with a comprehensive suite of tools that allow the system to be used to its fullest potential. These tools include heat load modeling, process tuning, heater mapping, gas flow optimization, and data logging. With all of these functions, the user can monitor and adjust the process to produce the highest level of quality with competitive speed. Overall, EATON NOVA Reliance 850 is simply the most advanced rapid thermal processor on the market. It is capable of providing reliable, repeatable, and highly precise processing results while exceeding the performance of its predecessor. With this technology, the semiconductor industry can continue to push the boundaries of advancement and optimize their processes for maximum efficiency.
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