Used STEAG / MATTSON / AST Helios #293624124 for sale

ID: 293624124
Wafer Size: 12"
Vintage: 2004
Rapid Thermal Processors (RTP), 12" 2004 vintage.
STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) used in semiconductor manufacturing. The device is used to rapidly and evenly heat semiconductor components, such as transistors and circuit boards, during processing. The device utilizes an inductive furnace to quickly and evenly heat the components. Its advanced thermal profile control provides rapid and uniform heating to maintain desired temperature control. AST Helios also has a built in gas injection equipment for nitrogen, argon, and hydrogen, allowing for quick and controlled atmosphere control. The device has maximum temperature of 1250° Celsius and provides uniform heating across the wafer. This provides a smooth and uniform thermal gradient across the substrate. It has uniform ramp up and cool down rates, allowing for better control over the thermal cycle. The system offers dynamic temperature control with a maximum achievable ramp rate of 350° C per second. This allows for rapid thermal processing of components without damaging them. STEAG Helios is capable of measuring and recording data points during processing. It also has an integrated data acquisition unit that allows for continuous monitoring during the entire process. This data acquisition is used to ensure optimal uniformity and temperature control of the wafer. The device comes with a wide variety of user-friendly controls, ranging from a basic 'one-touch' operation to a full range of power, time, and temperature control functions. MATTSON Helios also includes a host of advanced features such as multiple set points, alarm functions, operator access control, and a 'FAF-Trace' (Flexible Asymmetric Filler) feature. The latter allows the machine to dynamically adjust the parameters of the thermal ramp so the process can be tailored to a wafer's specific requirements. Helios is both versatile and easy to use. It is designed for ease of operation and its intuitive controls enable quick validation and process setup. The device is compatible with most modern semiconductor processing equipment, allowing for highly integrated and automated processing. Overall, STEAG / MATTSON / AST Helios is an effective rapid thermal processor designed to meet the needs of today's semiconductor manufacturing processes. Its fast heating performance and advanced thermal control capabilities provide the precision and versatility required by modern semiconductor industry.
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