Used STEAG / MATTSON / AST Helios #9228858 for sale

STEAG / MATTSON / AST Helios
ID: 9228858
Rapid Thermal Processing (RTP) system.
STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) designed for high-throughput, high-volume processing of a wide range of sample types. It features low cycle times and precise control of thermal processes, making it an ideal tool for photovoltaic, LED, high voltage electronics, passive and active device fabrication, and many other applications. AST Helios RTP works by uniformly heating and cooling a sample to predetermined temperatures. The sample holder is surrounded by a high precision quartz infrared heating belt and a water-cooled susceptor, allowing for precise temperature control and fast response. The susceptor acts as an insulating layer between the sample holder and the quartz infrared heating belt, ensuring uniform heating of the sample holder and its contents. STEAG Helios RTP features user-friendly automation and low equipment complexity. Its vertical design allows for easy access to the sample holder, and the unit itself is equipped with several ports for gas or vacuum connections. In addition, the RTP is able to store up to 64 recipes, allowing users to quickly and accurately repeat processes. MATTSON Helios RTP is a highly accurate and reliable system, with a temperature uniformity of +/-1°C and ramp rates to 750°C/minute. Its high power rating of 12 kW ensures rapid thermal processes and its repeatability is ensured through special compensation algorithms. The unit is also equipped with several safety features, including over-temperature protection, an emergency stop, and a power supply monitor. All in all, Helios is an ideal thermal processor for high-throughput applications. Its precise temperature control, low machine complexity, and advanced safety features make this a very reliable and repeatable tool, making it an excellent choice for a variety of fabrication processes.
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