Used STEAG / MATTSON / AST SHS 2000 #293639177 for sale

ID: 293639177
Wafer Size: 6"
Rapid Thermal Processor (RTP), 6" 1995-1996 vintage.
STEAG / MATTSON / AST SHS 2000 rapid thermal processor is a highly precise piece of equipment for carrying out thermal processing on a variety of materials. The processor consists of a variety of components, all working together in complex, finely tuned fashion to achieve the desired results. The processor features a single autoloader, built to streamline the substrate loading and unloading process. This feature is able to hold up to 12 quartz wafers that can be up to 8 inches in diameter. The wafers are arranged in a rotating configuration, providing a fast and efficient method of loading and unloading. The processor also features a two-zone, multi-zone chamber for carrying out the thermal processing. The two-zone chamber is designed to provide a consistent temperature and uniform heating and cooling, eliminating any undesirable fluctuations. The multi-zone chamber provides the option for differing temperatures to be applied to different parts of the substrate, allowing for a greater degree of control over the results. The processor also uses a RF tuned lamp or LED lamp to provide the necessary source of heat for the substrates undergoing processing. The lamp is powered by an adjustable DC power supply that can be specifically tailored to the needs of the application. The processor is also able to monitor the exact temperature of the substrate and the exact parameters of the thermal process via a temperature control system. A temperature indicator and data logger is used to provide this functionality, allowing users to view exact data. Finally, the processor has a range of safety features to protect the user, the substrate and the machine itself. This includes over temperature protection, which monitors and controls the temperature of the substrate to ensure that it does not exceed the desired temperature limit. There is also an emergency stop button, allowing for immediate shutdown of the machine in the event of an emergency. In addition to these features, the processor also uses proprietary software and an intuitive user interface to enable efficient and accurate operation. All of these combined create a highly efficient and reliable rapid thermal processor capable of producing consistent, high-quality results.
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