Used AMAT / APPLIED MATERIALS Centura DPS II #9243879 for sale

AMAT / APPLIED MATERIALS Centura DPS II
ID: 9243879
Vintage: 2005
Etchers (3) Chambers 2005 vintage.
AMAT / APPLIED MATERIALS Centura DPS II is a highly functional and advanced oxidation processing equipment designed for both research and production applications. This reactor is specifically designed for conformal heterojunction processes and offers superior process control. Its design allows uniform deposition of thin films in a variety of applications, including the deposition of high-k dielectrics, metals, polymers, and more. The chamber of AMAT Centura DPS II is made of low-thermal-mass stainless steel, which results in minimal thermal spread across the substrate surface. The system is equipped with an Outer Heat Shield, designed to minimize particle and scattering loss and its interior has a highly polished finish to reduce particle emission at high temperatures. The unit also features two loadlocks, which allow for faster loading and unloading cycles. APPLIED MATERIALS CENTURA DPS+ II also has an advanced endpoint detection machine, which eliminates the need for recipe tuning and monitoring during the run. The tool offers high heating performance with its powerful radiant dome and slotted inductive source. This allows rapid heating of up to 1000°C and ensures uniform temperature throughout the process. The silent running and maintenance free turbo pump ensures precision control of gas flow and precise pressure levels during processing. AMAT / APPLIED MATERIALS CENTURA DPS+ II power supply controller includes a Front Panel Interface (FPI) used for setting and monitoring the processing parameters. This controller allows for easy and fast tuning of parameters while enhancing process uniformity and repeatability. The adaptive Gamma Control algorithm enables precise control of plasma parameters and rapid measurement and feedback to maintain desired substrate conditions during deposition. AMAT CENTURA DPS+ II is an ideal choice for research and production applications. Thanks to its advanced design and features, the asset offers superior process control, improved uniformity, and faster loading and unloading cycles. In addition, its powerful heating and gas control capabilities and advanced endpoint detection make it an invaluable tool for modern oxidation processes.
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