Used AMAT / APPLIED MATERIALS Endura CL #9275824 for sale

AMAT / APPLIED MATERIALS Endura CL (Cluster Reactor) is a state-of-the-art chemical vapor deposition (CVD) cluster tool used in the semiconductor industry for advanced wafer processing. With its patented design, AMAT Endura CL provides fast, uniform, and reliable wafer processing with low particle generation. APPLIED MATERIALS Endura CL is capable of both thermal and plasma assisted CVD processes as well as etch and ash processes. This flexibility allows the equipment to be used for multiple wafer processing steps. The reactor has a vertical 7-chamber design and is equipped with an automated wafer handling system. The main chamber has a height of 6 metres and a diameter of 1.2 metres, making it perfect for uniform processing of large and small wafers alike. The chamber can accommodate up to 8-inch wafers with a max capacity of 200 wafer layers. The chamber is designed for chemical conformal deposition and is compatible with both powder and liquid precursors. The design of the chamber includes a range of intricate quartz inserts and covers to prevent wafer scratching and particle generation. Endura CL is designed to provide fast processing speeds of up to 500 wafers per hour and can achieve high throughput levels with low power consumption and no costly maintenance. The process chamber is fully sealed and pressurised to prevent contamination and keep particles generation to a minimum. The reactor has an adjustable gas flow control and temperature control unit that enables users to adjust the conditions of the deposition process. The machine is also equipped with an advanced plasma source and controller for precise control over plasma assisted etch and ash process conditions. AMAT / APPLIED MATERIALS Endura CL is built to the most exacting quality standards and guarantees repeatable process performance. It has been designed to meet the requirements of most advanced wafer fabrication processes, making it ideal for use in production environments. It is equipped with the latest safety features and alarms to ensure a safe and efficient operation on a continuous basis.