Used PICOSUN P300 #293628601 for sale

PICOSUN P300
Manufacturer
PICOSUN
Model
P300
ID: 293628601
Atomic Layer Deposition (ALD) reactor.
PICOSUN P300 is an advanced reactive ion etching reactor designed for deep submicron processing applications. It is especially useful for the fabrication of semiconductor devices including field effect transistors, integrated circuits, and MEMS. P300 is based on the same technology utilized in PICOSUN industrial-grade RIE systems, thus ensuring high-quality performance, reliable operation, and excellent process repeatability. The reactor is based on a plasma source with a gear driven chamber, which enables excellent process uniformity and repeatability even in challenging etch applications. PICOSUN P300 features a multi-channel gas injection equipment with gas blending, bubbling, and pulsed injection capabilities. It also boasts one of the largest standard chamber sizes of any RIE system in its class, measuring up to 500 x 400 x 200 mm. P300's automated turbo-pumping unit ensures uncompromised process chamber performance, allowing for extremely low base pressures and rapid conditioning. For versatile process control, PICOSUN P300 machine includes a sophisticated CAD workstation and intuitive software. The CAD workstation allows users to plot etch recipes and quickly perform process tuning. Third-party software can be easily integrated to expand control options, and the reactor's user-friendly touch panel simplifies operation and provides complete traceability of all upstream and downstream process steps. P300 is perfectly suited for the fabrication of both 3D and 2.5D structures. It features state-of-the-art electron cyclotron resonance (ECR) and inductively coupled plasma (ICP) sources, enabling users to precisely control etch depth and selectivity. High energy plasma processing of dielectric and metallic layers can be achieved by adding an additional N2 or O2 source, effectively doubling the tool's capabilities. PICOSUN P300's robust construction and patented design ensures superior performance and reliably accurate processes. It boasts superior cooling capabilities to ensure consistent and repeatable results, and its automated safety features protect both users and the process chamber from potential damage or malfunctions. In addition, PICOSUN also offers after-sales services such as maintenance and upgrades, allowing users to keep their systems up-to-date without the need for full asset replacement. This ensures that users are always operating with the latest technological advances, allowing for the most efficient and effective processing solutions. Overall, P300 is an ideal choice for any submicron etching application. Its advanced automation features and revolutionary technology guarantee superior performance, process uniformity and repeatability, while its robust construction and customizable software make it an ideal choice for professionals in the semiconductor industry.
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