Used VEECO / EMCORE TurboDisc K465i GaN #293601651 for sale

VEECO / EMCORE TurboDisc K465i GaN Reactor is a reliable and powerful deposition equipment specifically designed for high performance Gallium Nitride (GaN) processing. It enables anyone to achieve repeatable and consistent results with every process. This system utilizes TurboDisc (TD) technology, a combination of horizontal and vertical susceptor rotation with patented DualRF™ control to minimize the total foot print in tool and process. The TD technology provides uniformity and repeatability across all process hot spots, and high throughput cooling, which optimizes process time. The K465i utilizes a four-place cassette for maximum flexibility when using quartz flat-top susceptors. This reactor is equipped with advanced process control and monitoring capabilities, including an automatic variable substrate bias (AVSB) control and rapid thermal control (RTC). The AVSB control allows for uniform deposition of up to 350°C on to temperature sensitive substrates, while RTC enables temperature various parts in the chamber while keeping other parts at uniform temperature. The K465i is also equipped with an automated process chamber cleaning (APCC) unit, which jets precisely aligned dosing of clean and concentrated hydrogen and nitrogen species to the chamber walls, preventing any material build-up and non-uniformity. This machine can be easily configured with a variety of deposition sources, such as high purity gas (HPG), atomic beam sources (ABS), and electron cyclotron resonance (ECR) sources, allowing for maximum flexibility and versatile deposition profiles. In addition, the K465i is embedded with 20nm temperature control accuracy, which ensures high temperature uniformity in the chamber during any process. The K465i is intended for use in GaN R&D and high-volume production. It is user-friendly, versatile and reliable, delivering short cycle times and excellent layer uniformity in all aspects. And, with its safety features, such as real-time leak detection of process gasses, and a safety interlock tool for mechanical components, the K465i guarantees the highest standards of safety and performance.