Used CPA / KURDEX 9900-1 #9173356 for sale
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ID: 9173356
Horizontal in-line sputtering system
Entry / Exit load lock:
CPA Chamber
CPA Load lock valve
Load lock chamber 26"
Single pallet operation
12” x 24” Sputter zone
(1) Al Pallet, 15.5” x 25” x .25”
MKS 924 Multi-gauge for vacuum
Measurement ATM to -8 Scale
Pallet sensors
Process chamber:
CTI CT-8 Cryo pump
VAT Hivac valve
MKS Throttling valve
CTI 8500 Compressor
MKS 972 Multi-gauge for vacuum
Measurement ATM to -8 Scale
(2) Gas system with VCR gas lines
(2) NUPRO Isolation valves
(2) MKS MFCs for Ar 200 sccm , O2 50 sccm
MKS Variable throttle value
MKS 390 Baratron gauge
Chain drive transport system
AE Pinnacle+, 5 kW DC power supply
With sync cable
(4) CPA Process chambers:
(6) CPA 4.75” x 15” DC Magnetron assemblies
(6) Targets shielding
(1) CPA Process chamber
Oven run
Control system:
Opto-22 PLC
Monitor-simple PLC
Manual and auto control modes
Recipe control
(2) Stepper motors
I/O Wiring
SMC Soleniod block
UL Approved power box with EMO
CPA Optical pallet sensing system
With controller and sensors
RGA:
LEYBOLD Transpector
Installed with isolation valve
Dry pump.
CPA / KURDEX 9900-1 sputtering equipment is a magnetron-based system specifically designed for thin film deposition applications. It is a high-precision, multi-target unit that is perfectly suited for sputter-coating with a variety of materials. CPA 9900-1 has a maximum deposition rate of 0.3 Å/s, a target-to-sample distance range of 3 to 10 cm, and a maximum substrate size of 9 inches. It is also capable of sputtering both positive and negative targets. The machine is powered by an automated Argon-ion source and is equipped with a special, ultra-high vacuum (UHV) triple target magnetron sputtering gun. KURDEX 9900-1 is equipped with a variety of features, including a touch-screen display for ease of operation, a fully enclosed design for safety, and an LED display for target monitoring. The tool is additionally equipped with a PLC (Programmable Logic Controller) for optimized automation and precise control over the asset's sputtering processes. The model can also be integrated into an automated production line, allowing for fast and efficient sputter-coating of increments in patterned thin films. 9900-1 uses a high-power, specially designed plasma generator to create the optimum sputtering conditions. The sputtering parameters in this equipment are highly adjustable and can be programmed for optimum results. The maximum process temperature range is 0-1000˚C, and the maximum power output is 8kW. The system is further equipped with a water-cooled shield to ensure safety and reliability. CPA / KURDEX 9900-1 is an ideal choice for high-performance thin film deposition applications. Its exceptional precision and speed make it well suited for quickly and efficiently sputter-coating with a variety of materials. The unit is also equipped with several safety and monitoring features to protect the operator and the substrate from any potential interference. CPA 9900-1 is an accessible and cost-effective option for high-precision, high-performance sputtering applications.
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