Used ENGIS EJW-460IS #9181283 for sale

ENGIS EJW-460IS
ID: 9181283
Lapping system Plate size: φ460×φ180 (2) rings Force drive Planetary motion Polish plate.
ENGIS EJW-460IS is a wafer grinding, lapping and polishing equipment designed to provide precise, ultra-smooth finishes to fragile semiconductor materials such as silicon and germanium. This versatile machine can accommodate up to 8" wafers in its five-axis stage, allowing for simultaneous speed and acceleration control. The system is able to achieve precise results through its effective combination of open-loop hydrostatic bearing technology, closed-loop feedback control unit, and high-powered DC servo motor - all of which provide a consistent level of accuracy and repeatability. The machine is designed with an integrated control panel for easy role-based access, allowing operators to quickly adjust and monitor critical parameters such as pressure, speed, current and product compensation. EJW-460IS is also equipped with a detailed, graphical user interface that displays detailed images of the workpieces in order to ensure correct positioning on the stage. ENGIS unique abrasive slurries - slurrygrind and slurrypolish - are designed specifically to produce high quality wafer finishes and are available in a range of abrasive sizes from 0.05 to 3 μm. These slurry solutions can be dispensed automatically with ENGIS EJW-460IS's automated dispensing machine and can be combined with other slurry combinations for a wide variety of processes. In addition to slurry dispensing, the tool can be fitted with a variety of consumable accessory modules such as a vacuum chuck, MIRrorMATE profiler, laser interferometer, and quartz pressure chamber. These modules, along with the standard spindle, are designed to provide operators with the flexibility to achieve the highest achievable surface flatness on wafers with minimal outgassing, ensuring a perfect, ultra-smooth finish. To ensure safe operation of EJW-460IS, the asset is also designed with features such as multiple safety sensors and interlocks to protect both the machine and the workpieces. Moreover, the machine is fitted with dual operating modes for convenience and versatility, allowing operators to choose from manual or automatic operation. ENGIS EJW-460IS is the perfect choice for those seeking to achieve precise finish on complex materials such as semiconductors. This versatile and reliable machine is sure to provide the highest levels of accuracy and repeatability, along with a range of accessory modules in order to achieve the best results.
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