Used GUANGDONG FUSAN FXM-11 / FPG-9 #9093622 for sale

ID: 9093622
Beveling system.
GUANGDONG FUSAN FXM-11 / FPG-9 is a fully automated wafer grinding, lapping and polishing equipment designed to produce high quality, production level substrates for integrated circuit fabrication. The system has a simple, user-friendly control panel that monitors production, adjusts parameters, and views stored recipes through a touchscreen display. Its main components include an adjustable air bearing spindle, wafer transfer, sample handling, automated grinding/lapping/polishing head, and an Edge Detection Unit (EDS). For grinding applications, FXM-11 / FPG-9 features a Macro Auto line analyzer which precisely controls the movements of the abrasive slurry. It also has built-in abrasive noise reduction for low-noise operation and improved safety. The machine offers highly customizable process recipes to effectively meet customer requirements. For example, grinding methods can be set based on specific wafer geometry, substrate requirements, and process constraints. The Edge Detection Tool (EDS) is the highlight feature of GUANGDONG FUSAN FXM-11 / FPG-9. This asset monitors sidewall roughness using an inverted knife edge to detect the surface flatness to within 0.5 µm. The EDS also provides an on-screen graph of edge detection points and precise control over grinding strokes. As a safety measure, the model has an acoustic warning if the Knife Edge detects any cracks or chips in the sample. The wafer transfer equipment ensures uniform transfer of polished wafers to the next process without contamination. Sample handling of FXM-11 / FPG-9 is designed to maximize system speed without compromising on quality. It can accommodate sample sizes up to 8 inches while minimizing particle contamination. In short, GUANGDONG FUSAN FXM-11 / FPG-9 from GUANGDONG FUSAN is an ideal solution for production grinding, lapping, and polishing of wafers with an unbeatable combination of accuracy and efficiency. Its versatile features and functions enable industry professionals to produce precise, high quality substrates with minimal effort. What's more, its high-end safety functions make it suitable for use in a wide range of production environments.
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