Used OPTOTECH ASM 80 #9198173 for sale

ID: 9198173
Vintage: 2011
Polisher 2011 vintage.
OPTOTECH ASM 80 is a wafer grinding, lapping, and polishing equipment designed for the fabrication of wide variety of semiconductor devices. It is equipped with a semiconductor grinding unit and a three-axis table for polishing the specified substrates. The grinding unit, with a diamond wheel and high precision servo drive, enables the precise grinding of complex shapes and planes with a minimum of material removal. The lapping process is carried out using a combination of diamond and colloidal slurries, as well as sharp edged alumina slurry, to help accelerate the process. The alumina slurry helps create nanometer grade finishes on the substrate, while the diamond slurry results in high production yields. ASM 80 polishing station is equipped with two polishing heads that are connected to two independent diamond controllers. Each polishing head has a robotic arm with a special pad holder, which is capable of precise positioning and velocity control. The controllers also have built-in features such as an autofocus control system, a substrate protection unit, and a contact angle adjustment machine. An automatic polishing program is used to enable the precise control of elapsed time and the precise settings for the parameters that control the polishing. The program also allows for the adjustment of the contact angle and the pressure between the pad and the substrate. OPTOTECH ASM 80 is equipped with a built-in thick film regeneration station, which can achieve precise substrate thicknesses up to 0.2 mm. The regeneration station has adjustable speed, pressure and abrasive settings, as well as a special pressure release tool that helps protect delicate substrates. Finally, ASM 80 is capable of post-polishing measurement, which includes the ability to measure substrate flatness and surface texture using both a near-field optical microscope and a scanning electron microscope. The asset is also capable of in situ measurement of the contact angles between substrates and the polishing pad. Overall, OPTOTECH ASM 80 is a versatile and user-friendly wafer grinding, lapping, and polishing model that offers high precision performance, that is ideal for providing superior quality results in the semiconductor device fabrication industry.
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