Used ENTEGRIS Ultrapak #55219 for sale

ENTEGRIS Ultrapak is a wafer handler designed for use in a variety of semiconductor production and test applications. It offers full compatibility with all standard wafer sizes and supports a variety of applications for cassette-to-cassette and robot-to-robot transport. Ultrapak features a unique modular design that can be adapted and configured to meet specific process and product requirements. The wafers are loaded into a cassette and placed into ENTEGRIS Ultrapak unit, then a robotic arm transports the cassette to the next processing step. Ultrapak's redundant design offers advantages in terms of reliability and maintenance, while minimizing the risk of equipment failure and contamination. ENTEGRIS Ultrapak can be used in new as well as existing process equipment and configured to work with a variety of automation systems. Its built-in, multi-positional vacuum system provides precise, high-speed wafer transport with low handling force and minimal vibration, resulting in fewer particles and die damage. Additionally, Ultrapak can be configured with a dual-chamber design, including a transporter and a susceptor, to enable batch loading and indexing from a variety of wafer markets. Its robotic arm is capable of positioning a wafer to any position in the handler with high accuracy, enabling rapid positioning of multiple wafers within a single cycle. ENTEGRIS Ultrapak is built with state-of-the-art safety features that ensure operator safety and minimize contamination. Its air filtration system is designed to prevent the introduction of contaminants and particles into the process and its shields are easily removed for maintenance or cleaning. Additionally, its advanced sensoring system ensures proper wafer loading and positioning as well as fault detection and fast response to any misalignment of the wafers. Ultrapak is designed with a number of process-specific components, including a Transfer Load Lock, Wafer Loading Jig, and a Wafer Positioner. The Transfer Load Lock ensures that the transfer is secure and minimizes the risk of contamination and particle generation during transport. The Wafer Loading Jig helps to precisely position the wafer into place and comes with a unique, single-pulse loading feature that helps reduce particle generation. Finally, the Wafer Positioner provides high accuracy wafer placement and helps ensure a uniform wafer footprint throughout the process.