Used MACTRONIX Eureka UKA-825 #52725 for sale

ID: 52725
Wafer Size: 8"
Auto wafer transfer system, 8".
MACTRONIX Eureka UKA-825 wafer handler is a fully automated device that provides precise, precise handling of up to 8" diameter semiconductor wafers. It places the wafers accurately and securely into multilayer trays or FOUP type automated cassettes. This handler uses an Envirotech direct drive pick and place module (DPPM) to access and transport wafers and subject them to rigorous processes such as illumination testing, chemical vapor deposition, or chemical treatment. The precise, motion control equipment of Eureka UKA-825 is engineered to provide excellent repeatability and low-tolerance performance. Its axis motion is powered by a high-precision, brushless DC servomotors. An advanced ladar sensing system and closed-loop positional feedback provide dynamic repeatability and maximum process safety. MACTRONIX Eureka UKA-825 is optimized for ultra-precise, repeatable wafer handling. The articulated robot arm is equipped with a robust cantilever that can insert and extract wafers into even the deepest trays and automated cassettes. Its multiple vacuum pickup mechanisms and blade edge conveyance action prevent scratching during handling. Eureka UKA-825 is constructed with a compact, space-saving footprint that facilitates quick and easy integration into any semiconductor processing suite. A highly intuitive, web-based graphical user interface (GUI) features real-time process information, critical parameter reviews and thorough traceability. The GUI also empowers users to develop custom recipes and perform error recovery and preventive maintenance. MACTRONIX Eureka UKA-825 is designed to be exceedingly reliable and safe. A full enclosure guards against external contaminants and deflects hazardous out-gassing. Many sophisticated safety mechanisms further protect hardware, such as a dual-lock safety interlock unit, emergency stop, point-to-point power shutoff, motor overload protection and fault safety indicators. In short, Eureka UKA-825 wafer handler is a next-generation wafer handling machine optimized for semiconductor processing applications requiring high precision, repeatability and safety. With its advanced features, robust construction and improved process sustainability, it is capable of achieving the highest quality standards available on the market today.
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