Used MITSUBISHI CR751-04VD1-0-S19 #9411580 for sale

ID: 9411580
Vintage: 2014
Robot 2014 vintage.
MITSUBISHI CR751-04VD1-0-S19 is a highly advanced, automated wafer handler designed for high-capacity 8-inch wafer applications. It is a fully-integrated robotic handling equipment that can be used in both semiconductor fabrication lines and advanced research and development facilities. CR751-04VD1-0-S19 features a unique single-axis design that eliminates the need for complex mechanical linkages and turntables. This allows for precise, continuous wafer advancement and containment within the system. The equipment runs on MITSUBISHI proprietary software and hardware, providing precise control of each stage in the handling process. MITSUBISHI CR751-04VD1-0-S19 has a modular design that enables quick setup and reconfigurability for each specific application. It is equipped with a motorized Z-axis spindle to optimize the individual positionings of the wafer, and a precise built-in vision unit to ensure the precise alignment of both wafers and frames. It also features a wafer master-slave robot that supports a 200mm wafer size. This allows the wafer to be precisely loaded and unloaded in a highly efficient and accurate manner. CR751-04VD1-0-S19 also supports the transfer of up to 24 pieces of wafers in parallel. Its integrated vacuum handling machine can accurately handle many different types of 8-inch wafers, including silicon, germanium, and gallium arsenide wafers. It has a high-speed precision transfer tool that can handle up to four wafers simultaneously while concurrently adjusting the spacing between them. MITSUBISHI CR751-04VD1-0-S19 is compatible with the most widely used semiconductor fabrication tools, such as evaporators, PECVD systems, LPCVD systems, and spin-coaters. It also features advanced safety features such as an interlocked access door and a safety relay for extra safety assurance. Additionally, it is equipped with robust real-time data collection and storage capabilities, enabling it to accurately handle larger volumes of data. Finally, CR751-04VD1-0-S19 has an impressive power-saving function that helps to further maximize the cost efficiency.
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