Used YASKAWA / MOTOMAN NX100 #293585818 for sale

ID: 293585818
Robot Type: ERCR-ECS1200DNL-AE00 CPS-420F Power Supply (6) Servopacks.
YASKAWA / MOTOMAN NX100 is an advanced wafer handler designed to meet the industry's highest standards of accuracy and productivity. Equipped with an intuitive touchscreen interface and a high-speed servo motor, this wafer handler is an ideal choice for semiconductor manufacturing applications. YASKAWA NX100 provides a package of high-performance features including a four-axis gantry type structure, a long-life servo motor, and advanced motion control technology. This combination provides the user with a high degree of positional accuracy, repeatability, and flexibility to handle various types of wafers. It is also equipped with a range of state-of-the-art safety features including advanced programmable limit switches, sensor systems, and force sensing technology. MOTOMAN NX100 is capable of rapid hand-off of up to 400 wafers per hour. This movement is enabled by an advanced programmable logic controller (PLC) that utilizes synchronous movement commands to ensure precision and repeatability. This PLC is capable of controlling up to 32 axes simultaneously, allowing for fast and accurate handling of multiple wafers. NX100 also features an integrated teach pendant that allows for priority programming and process optimization, enabling users to quickly adjust the positioning of wafers for processing. YASKAWA / MOTOMAN NX100 is capable of handling wafers up to 50 mm in diameter and 7 mm thick. This is due to its wide range of motion range (X axis 500 mm, Y axis 320 mm, Z-axis 200 mm). This range allows users to handle a wide variety of wafer sizes and shapes. YASKAWA NX100 is also equipped with a six-port valve experience table and a dust filter to ensure the highest quality process performance. MOTOMAN NX100 is designed to be a reliable, user-friendly system for efficiently handling wafers and fulfilling industry requirements for accuracy and productivity. This advanced wafer handler can be used standalone or integrated into a complex robotic system to increase efficiency and reduce cycle times.
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