Used ASML AT760D #9298747 for sale

ASML AT760D
Manufacturer
ASML
Model
AT760D
ID: 9298747
Wafer Size: 12''
Vintage: 2006
System, 12" 2006 vintage.
ASML AT760D wafer stepper is a state-of-the-art machine used in semiconductor manufacturing. It is designed to move semiconductor wafers around within a limited space to accurately align and expose the wafers to light generated by a UV light source during the "stepping" and "scanning" stages. AT760D can handle various wafer diameters (150, 200 & 300 mm) and comes equipped with a variety of features that enable it to perform a majority of stepper operations organically and automatically. The stepper can be used in a variety of lithography applications such as deep ultraviolet (DUV), extreme ultraviolet (EUV) and extreme ultraviolet nano-lithography (Nano-EUL). Additionally, ASML AT760D is capable of handling multiple layers of reticles, making it ideal for multi-patterning applications. AT760D employs a unique closed-loop scanner position control equipment to ensure accurate pattern placement. This system takes advantage of ultra-high precision linear scales that accurately measure real-time wafer movement and position. Additionally, the unit cuts down on waste production as it minimizes pattern registration errors and overlap. ASML AT760D is designed to optimize pattern placement through its advanced superimposed stepper machine. As the wafer moves across the stage, its position is tracked in real-time and its motion is dynamically compensated to ensure accurate pattern placement. This minimizes stepper operation time and increases throughput rate. AT760D is designed for maximum tool throughput and performance. It utilizes an optimized vacuum feeding asset with multiple adjacent wafer stages for reduced alignment time and improved placement accuracy. Additionally, the stepper's highly reliable motion control systems ensure excellent batch-to-batch accuracy and wafer-to-wafer consistency. ASML AT760D also supports a variety of options to meet production requirements, such as air abrasive and thermal annealing capabilities. Furthermore, the stepper is equipped with an advanced vacuum model to enable accurate transfers and reduce particle generation. In addition to its advanced features, AT760D has enhanced environmental features such as dust-proof construction, improved sealing and anti-static designs. These features ensure that the stepper operates efficiently and reliably and meets safety regulations and standards. Overall, ASML AT760D wafer stepper is an advanced and reliable machine for lithography applications. With its accurate closed-loop scanning equipment, optimized feed system, enhanced options and environmental features, it is sure to meet the most demanding semiconductor production needs.
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