Used ASML Twinscan AT 1100 #9360842 for sale

ASML Twinscan AT 1100
Manufacturer
ASML
Model
Twinscan AT 1100
ID: 9360842
ARF Scanner.
ASML Twinscan AT 1100 is a two-beam wafer scanning equipment designed for semiconductor device production. It features an easy-to-use graphical user interface and high-end digital signal processing. The system is optimized for high speed as well as for precise alignment and focus. Twinscan AT 1100 supports quick treatment times of 24/7 at highest throughput and low cost-of-ownership. The wafer stepper also features advanced overlay capabilities for critical registration, improved quality, and data management. ASML Twinscan AT 1100 utilizes advanced technologies for high-definition imaging, process control, and to ensure high-precision operations. It includes an advanced auto alignment, reference alignment map, and on-the-fly compensation features for stable alignment. The unit also features a high-resolution wafer positioning and traceable metrology stations. These are designed to measure x, y, z motion, pitch, roll, and more. Twinscan AT 1100 also features smart imaging which enables users to take advantage of the latest in image processing technology. It includes up to 256-bit resolution with several advanced imaging technologies such as auto focus, lens distortion correction, and image binning. The machine also utilizes both a scanning head and a high-precision optical profiler. This ensures high-resolution and reliable information for application-specific wafer flatness and defect identification. ASML Twinscan AT 1100 is an entirely modular tool that is designed for use in a wide range of wafer processing applications. It supports a variety of scan formats, from reticles to large-scale wafers. It also features a scalable design with a single field-of-view range from 5μm up to 200mm, enabling users to select the most suitable scanning technology for their specific application needs. Twinscan AT 1100 also provides cost-of-ownership advantages, making implementation attractive for small and medium-sized semiconductor production facilities. It features a low and independent maintenance structure so that users can cover their own service and support needs. In addition, the wafer stepper includes an integrated environment monitoring station and optional metrology services to ensure a stable process.
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