Used C SUN Stepper #293669782 for sale

C SUN Stepper is an advanced wafer Stepper used for patterning integrated circuits using photolithography. C SUN Stepper is designed to produce a precise, high-resolution exposure of integrated circuit designs to light. It consists of mechanical, imaging, and illumination components that allow for accurate feature sizes and repeatable alignment. Mechanically, Stepper features a four-quadrant alignment equipment composed of a reticle stage which holds the reticle (or mask), and a wafer stage which holds the wafer or substrate. The system supports semi-automation and automation and can accommodate wafers up to 8" in size. In addition, C SUN Stepper supports step-and-repeat alignment and stitching of fields. Stepper offers an imaging unit that uses a high-aperture optical machine in combination with high-precision motors for image-shift and magnification operations. It features a variable numerical aperture (NA) from 0.15 to 0.55, with a maximum resolution of 0.4 microns, and a high-numerical aperture (HNA) lens that supports images of 0.25 microns. The tool also includes an adjustable reticle focus mechanism. C SUN Stepper also features a variable-illumination asset that supports multi-zone focus control and large-field uniformities with a consistent depth of focus. It uses variable-aperture and variable-attenuation shutters to fine-tune the illumination profile for best exposure performance. Stepper also offers an auto-alignment function that ensures a high level of repeatability, even in long production runs. Overall, C SUN Stepper is designed for accurately and reliably patterning integrated circuits. Its combination of imaging, illumination, and alignment components make it a reliable choice for fabricating production-grade integrated circuits.