Used CANON FPA 6000 ES6a #9247815 for sale

CANON FPA 6000 ES6a
Manufacturer
CANON
Model
FPA 6000 ES6a
ID: 9247815
Wafer Size: 12"
Vintage: 2007
Stepper, 12" 2007 vintage.
CANON FPA 6000 ES6a is a high-performance wafer stepper engineered to enable manufacturers to meet the stringent demands of their businesses. The ES6a is a self-contained equipment designed for accuracy, speed, and reliability. The ES6a is ideal for wafer steppers used in the semiconductor production process due to its high-resolution images and accurate patterning capabilities. It is well-suited for patterning feature sizes down to 120 nanometers, allowing for the creation of smaller, more complex integrated circuits. The ES6a is designed to operate with different wafer sizes, ranging from 4 inch to 8 inch. It features a unique, proprietary Variable Daylight System (VDS) source which enables consistent imaging on a wide range of wafers. The VDS also eliminates the need for refocusing during operation, maximising throughput and workflow efficiency. The ES6a employs a high-resolution scanning unit which uses a laser spot size of 3.5 microns to improve image accuracy. It also features an advanced optics machine that provides multiple imaging formats, allowing for efficient and comprehensive pattern production. The ES6a is designed with CANON proprietary A&C auto-calibration process to ensure accurate patterning and imaging. The auto-calibration systems enable quicker setup times and improved reliability during patterning operations. The stepper also has an advanced wafer information tool which monitors process parameters such as stage position and exposure intensity, ensuring ease of operation. The ES6a is equipped with a powerful and user-friendly interlock asset that prevents accidental damage to wafers. It also features advanced wafer-level mapping to ensure accurate pattern placement and a position detection model that ensures repeatable pattern placement. The ES6a is an ideal wafer stepper for production operations that require accuracy and throughput. It is capable of producing high-quality images and patterns with accuracy and repeatability. Its numerous advanced features allow it to maximise efficiency and productivity while minimising costs.
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