Used CANON FPA 6000 ES6a #9384057 for sale

Manufacturer
CANON
Model
FPA 6000 ES6a
ID: 9384057
KrF Scanner, 12" 90 nm.
CANON FPA 6000 ES6a is a wafer stepping machine designed for use in the semiconductor industry. This machine provides a cost-effective means of producing wafers with high accuracy and repeatability in the production of integrated circuits. The machine utilizes an advanced electrostatic-based lithography system, enabling it to perform photolithography at a very fine resolution level and decrease critical stepping errors. CANON FPA 6000ES6A allows for the fabrication of any design with an extremely wide field of view, as it is equipped with a 200mm flat-bed aligner and an antireflection coated objective lens. This allows the machine to provide a better and more precise field of view than conventional steppers. The machine can perform with double-sided alignment accuracy, which is necessary for photolithography processes with an IC chip. It also has an integral two-channel continuous alignment system that ensures stable and accurate wafer alignment on both steel and ceramic carriers. FPA-6000ES6A has a stepper control unit with manual and semi-automated operation modes. The machine can be operated with a PLC or computer program and can be integrated with industrial robots and other production equipment for a fully automated production system. The machine has advanced vacuum capability, providing it with a low table pressure that produces superior lithography results. In addition, the machine is equipped with a special automatic-cleaning unit that helps to reduce the possibility of contamination. FPA 6000 ES 6 A can be used in combination with various stepping-gauge systems to provide accurate and repeatable results in the most challenging applications. An intuitive joystick controller with a graphical display eliminates the need for complex procedures and allows users to easily control the machine. FPA 6000ES6A also offers a choice of three reduction types, namely half reduction, quarter reduction, and eighth reduction. This variety allows for a wide range of lithography applications, including micromachining and nanofabrication. Overall, CANON FPA 6000 ES 6 A is an accurate, dependable, and cost-effective wafer stepper, offering superior performance and high operational efficiency. With its automatic-cleaning unit, advanced vacuum capability, three reduction types, and intuitive joystick controller, this machine has all the features necessary for successful photolithography processes.
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