Used KLA / TENCOR Alpha Step 200 #293652814 for sale

KLA / TENCOR Alpha Step 200 is a sophisticated wafer testing and metrology equipment that has been designed to provide rapid and accurate testing of a range of semiconductor materials. The system is a fully automated solution that offers comprehensive parameters for direct physical and chemical analysis of wafers including flatness and surface topography, trench depth, IC corner edge chamfer and profile, overlay, sidewall angle, form factor, and edge roughness. Built around an automated x-y stage, KLA ALPHASTEP 200 utilizes surface point analysis to accurately measure physical and electrical characteristics of wafer materials. As a result, it offers comprehensive testing of wafers over a variety of industrial processes, ensuring that products meet requirements and are delivered quickly and securely. TENCOR ALPHA-STEP 200 offers two sensing systems - optical and Piezo. Its optical unit is an innovative tri-wavelength sensor featuring advanced magnetism and laser technology; thus, it can precisely characterize sidewall layer profiles, trench edge chamfer, form factor, line width and other important geometrics and edge roughness. The second sensing machine, Piezo, enables KLA ALPHA-STEP 200 to analyze wafer micro-structure. Utilizing an air-bearing surface to capture small surface features, the tool is able to detect various features including overlay accuracy, line, width and rule-hollowing. Additionally, it can test for electrical characteristics such as sheet resistance, contact resistance and junction depth. TENCOR Alpha Step 200 also provides a range of automated functions that give users the ability to quickly evaluate and analyze wafers. The asset includes pattern recognition algorithms that can automatically locate defects, analyze their locations, indicate their location and class, and initiate appropriate corrective action. Furthermore, the model offers a library of test data that can be compared with the test material to ensure that the latter meets specifications. This helps users get accurate results more quickly, thus saving them time and money. In summary, TENCOR ALPHASTEP 200 is a powerful wafer testing and metrology equipment that offers comprehensive parameters for direct physical and chemical analysis of wafer materials. Featuring two advanced sensing systems and a range of automated functions, the system enables users to quickly evaluate and analyze various industrial processes in order to ensure product certification and safe delivery.