Used KLA / TENCOR / THERMA-WAVE Optiprobe 2600 #9257351 for sale

ID: 9257351
Film thickness measurement systems.
KLA / TENCOR / THERMA-WAVE Optiprobe 2600 is an advanced wafer testing and metrology equipment that enables high-precision measurement of semiconductor devices. KLA Optiprobe 2600 provides real-time, edge-to-edge metrology of semiconductor wafer and die-level features. This system features an 8-inch chucky stage that can accommodate up to 200 mm wafer. Its optical scatterometry using a dry technique coupled with a unique chemical cleaning methodology, eliminating the need for a liquid immersion unit. TENCOR Optiprobe 2600 includes a stage controller for accurately controlling the movement of the wafer in the x, y, and z axes. It also incorporates a high-resolution mapping mode which enables extremely detailed measurements. The integrated imaging machine provides superior optics with lighting, brightfield, darkfield, and oblique imaging capabilities. The imager provides 13 megapixel resolution and greater than one micron pixilation for detailed imaging results. THERMA-WAVE Optiprobe 2600 features a "smart" software package that automatically performs optimization of tool calibrations, optimization of test parameters, and real-time alignment of features. This tool also provides users with access to historical data and reports, as well as real-time data visualization. The advanced data analysis capabilities provides users with the ability to accurately determine process performance related to feature size, shape, and location. Optiprobe 2600 is an ideal metrology and measuring asset for users requiring high performance, high accuracy and superior repeatability. This model provides reliable measurement results with a high degree of repeatability. Additionally, a wide range of wafer sizes and chemical coatings can be accommodated, making this equipment suitable for a variety of applications. With advanced automation capabilities, minimization of manual intervention time, and intuitive software operation, KLA / TENCOR / THERMA-WAVE Optiprobe 2600 is a great choice for semiconductor wafer testing and metrology operations.
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