Ion Milling Machines. Various configurations.

auto loadlock ion mill, 4-6". Substrate capacity up to 8”x8” and 10” dia, Clean, anisotropic, high yield etching of any material including Au, Du, Ni, Cr, and TiW.

auto loadlock ion mill, 4” square substrates, anisotropic, high yield etching of any material including Au, Cu, Ni, Cr, and TiW. Multistep etch processes for stacked layers (MLC, MCM), ceramics, hybrids, thin film heads, flat panel displays, and high frequency devices. Substrate capacity up to 8" x 8" and 10" diameter. Weights to 5 pounds. Process flexibility includes IBE, RIBE, CAIBE, Patented "Flowcool" substrate cooling system with failsafe sensing Here is a list of the new spare parts for the Veeco LL-250 1 Magnetic sensor Shutter Gear Assembly Shutter Worm Gear Moly Screws for Source Tungsten Source Wire Tungsten Neutralizer Wire Assorted Insulators Assorted O-Rings PC Computer: Comark Model: 4000 Series Intel 486i Rotation and tilting options configured System used to mill: Platinum, Titanium, Nickel, Copper and Nichrome thin film metals We also have the used parts (4 inch fixturing plates) that have been replaced in the machine Operational Can inspect 1994 vintage.

system.

Ion milling machine.

Ion Beam Etcher, 6".

ion beam milling machine.

Ion Milling Machine 6" Upgrade kit to 8" available Robot with brooks cassettes with setup software C2 dual chamber 2006 vintage.

Ion Milling Machine, 8", (2) RF350 chambers, (1) Brooks front end with (2) load locks, includes: dry pumps, heat exchangers, control racks, associated cables, refurbished.

Single lever controlled pump system, includes Veeco 3" air cooled diffusion pump rated at 170 l/s, LN2 trap, manually operated valves, Welch 1402 -5.6 CFM- mechanical roughing pump and a combination ion/thermocouple gauge controller All system components are mounted in a convenient roll around enclosure.