Etchers / Ashers: MARCH AP 1000

ID#: 9095528 Status: Installed And Demonstrable Manufacturer: MARCH Model: AP 1000 Category: Etchers / Ashers Vintage: 2005 Equipment Details: Plasma cleaning system
Chamber dimensions 16"x16"x18"
(2) Porter MFC's
ENI ACG-3B 600w 13.56mhz RF Power supply
LEYBOLD D65BCS Vacuum pump
Auto impedance matching network
PLC controller with touch screen
Automatic door for high throughput
208v-230v, 3 phase

2005 vintage.
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