Used LEYBOLD HERAEUS ARES 1100 #9055005 for sale

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LEYBOLD HERAEUS ARES 1100
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ID: 9055005
Box coater.
LEYBOLD HERAEUS ARES 1100 is a fully automated and programmable photoresist spin coating equipment designed to assist in the production of precision resist components. This system utilizes ARES 1100 coating and preparation concept to ensure the highest possible coating quality. LEYBOLD HERAEUS ARES 1100 is equipped with a base station vacuum unit, a maincoating chamber, a pre-cleaner chamber and a post-cleaner chamber. It is engineered to enable precision coating of photoresists, polyimides, laser resist, and other materials on wafers, substrates, and other components. ARES 1100 machine utilizes a precision coating and preparation concept, with several unique features that include automatic process control, time-controlled deposition cycle, integrated process monitoring, integrated metrology monitoring, narrow resist architecture design, and advanced resist transfer technology. The tool is designed to provide repeatable, high-quality, thick film coatings of photoresists, polyimides, and laser resist with consistent and reproducible results. In addition, this asset provides users with several additional benefits. With the ability to deposit both thick and thin films of material, LEYBOLD HERAEUS ARES 1100 can coat wafers as thick as 0.2um and as thin as 100nm. The maincoating chamber of the model can also accommodate a variety of wafer shapes and sizes, including 3" wafers, 4" wafers, 6" wafers, and 8" wafers. Furthermore, the integrated process and metrology monitoring provides real-time monitoring of wafer thickness and adhesion during the deposition process. ARES 1100 significantly reduces processing time as compared to traditional spin coating methods. It also allows users to precisely control wafer size and shape, and enables rapid and accurate deposition of precise film thickness. Finally, due to the capabilities of this automated equipment, no manual adjustments are necessary, making it ideal for use in high-volume production environments.
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