Used ASM A 412 #9137395 for sale

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ID: 9137395
Wafer Size: 12"
Vintage: 2011
Vertical LPCVD furnace, 12" P/N: 2E0082-06-01 CIM: E84, SECS/GEM, GEM300 Nitride furnace (2) Ports Protocol zone: FEOL SMIF Handler Chamber 2011 vintage.
ASM A 412 is a diffusion furnace used for industrial applications like semiconductor production. It is a 400 mm vertical furnace with a multi-zone design for flexible production and higher throughput. The furnace also features energy saving technologies and an improved thermal homogeneity. The temperature range of the furnace is from 250°C - 1250°C and the heating elements are made of high temperature alloy. The furnace is also equipped with full automation for process repeatability and reliable operation. The main parts of ASM A412 are the bedplate, the inlet and outlet systems, the body, the lid and the power supplies for the heating elements. The bedplate is the base of the furnace and is made of high-grade aluminum alloy for maximum durability. The inlet and outlet systems are designed for maximum uniformity of the heating of the substrate. The body of the furnace is double-walled with a heat insulation made of ceramic fibers and an outer panel made of stainless steel. The lid is made of stainless steel and features a tightly sealed enclosure with two view ports and a reinforced lifting handle. The heating element for A 412 consists of silicon carbide rods that are powder-coated. The elements use a low voltage DC power supply that is adjustable and stable for precise control. The power supplies are protected from voltage and current surges with an inbuilt safety regulation and can be remotely controlled. A412 comes with various accessories to help automate the process. The accessories include an integrated mass flow controller for controlling inert gases, a timer relay for controlling AC power to the heating elements, and a pyrometer for monitoring process temperature. The furnace also features a programmable logic controller (PLC) which can be used to automate process parameters, calculate hydrogen concentration, monitor pressure, and control lead/tin bath temperature. ASM A 412 is a highly reliable and efficient diffusion furnace that is well suited for a variety of applications and industrial processes. With its advanced features, user friendly design, and quality components, ASM A412 provides accurate and repeatable results in production.
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