Used ASM A 412 #9185404 for sale

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ASM A 412
Sold
ID: 9185404
Wafer Size: 12"
Vertical furnaces, 12" Dual reactors cure VDF: CU, PI WIP Module: Part number / Description 2945169-01 / Main frame WIP assembly 2379589-01 / Elevator chr 2947641-01 / Cassette stacker carousel 2944170-01 / Cassette transfer module 2947692-01 / Load port 2403641-01 / Pneumatic box 2947617-01 / WIP Flow box Reactor module (Base model info): Part number / Description 2330865-01 / Main reactor A412 frame assembly 2916177-01 / Reactor A412 top frame 2931303-01 / Reactor servo drive 2370387-01 / Reactor EMO / Motion 2931257-01 / BTC Box 2373718-01 / WTC Box 2909251-01 / R1 / R2 Controllers 2936550-01 / Reactor touchscreen 2327287-01 / Carousel bearing 2329999-01 / Carousel housing 2931222-01 / Carousel drive 2931109-01 / Reactor carousel 2379872-01 / Reactor fan 2936739-01 / A412 Gate valve 2997320-01 / Boat elevator A412 2972786-01 / Loader arm LP ROT 2936666-01 / O2 Analyzer reactor GEN 2366460-01 / N2 Purge generic 2330768-01 / TCU / TCF Generic 2330350-01 / VAC / PNEU Comp A412 Miscellaneous: Part number / Description 2895587-01 / (2) End effectors 242 CER 2927772-01 / N2-Purge 200 SLM assembly 2927810-02 / Reactor O2 analyzer 120 VAC 2405067-01 / Door opener 2nd GEN IC 2888025-01 / Transponder 2356341-01 / Press sens WHR single 2356333-01 / Press sens RC car Reactor chambers 1-2: Part number / Description 2995905-01 / Reduced exhaust ATM kit 2842939-02 / Process tube ATM NQ thin kit 2897334-02 / Door plate ATM LT H2 SS 2845644-02 / Wafer carrier NQ ATM 300 mm 2805847-01 / Thermocouples ATM BC 2954664-01 / Mount block FLG'S 2869764-01 / FLGS Proc / Door ATM MK 2806096-01 / ATM Scavenger purge 2864282-02 / Outlet no QTZ ATM H2-cure kit 2894564-01 / Heat exchanger RC1 / RC2 2996235-01 / Klixon heater element 2953927-01 / Heat ELEM ATM FR LT 2836343-01 / ATM Exhaust RC1 / RC2 120 V 2301652-01 / ELEC FLG'S ATM A412 2866048-01 / Heater outlet ATM 24 V 2955644-01 / GASP H2 Cure RC 1/2 2907860-01 / Intermediate H2 Cure RC 1/2 2310953-02 / INC GASL RC 1/2 901300 2865262-01 / H2 Sensing RC1 / RC2 2332108-01 / Pump TCU 2862255-01 / O2-Analyzer ATM H2 cure RC 1/2.
ASM A 412 is an advanced thermal processing tool designed to uniformly heat diffusion substrates and related components. It can process substrates of up to six inches in diameter with an impressive Thermal Gradient of ±3°C. The heat is generated by long life tubular heating elements that are operated via independent energy control systems. The unit is equipped with heat-treating functions such as pre-treated heating, uniform soaking, curve-following heating, and cooling rate control. This equipment features a vacuum break, enabling the furnace to be evacuated in order to remove air or other gases from the substrate surface before diffusing takes place. The diffusion process occurs when the heating elements are energized, which raises the temperature of the furnace to a required set point. The substrate is then placed in the hot zone to expedite the diffusion process. The unit features a vertical loading design that provides quick and easy substrate access as well as a uniform temperature gradient throughout the furnace. It also features an air-cooling system integrated with the heating chamber, which helps to significantly reduce the diffusion time. Additionally, the unit includes an advanced graphite heater, which helps to maintain the required temperature uniformity. In order to ensure optimal safety levels, the unit also has an emergency switch. ASM A412 diffusion machine is an easy to use, reliable tool that can be used for a wide variety of diffusion procedures. Its flexibility makes it a great choice for those who need a fast, reliable and high-performance thermal processing asset. Its combination of features ensures great results making it a great choice for those in the diffusion processing business.
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