Used ASM A 412 #9185404 for sale
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ID: 9185404
Wafer Size: 12"
Vertical furnaces, 12"
Dual reactors cure VDF: CU, PI
WIP Module:
Part number / Description
2945169-01 / Main frame WIP assembly
2379589-01 / Elevator chr
2947641-01 / Cassette stacker carousel
2944170-01 / Cassette transfer module
2947692-01 / Load port
2403641-01 / Pneumatic box
2947617-01 / WIP Flow box
Reactor module (Base model info):
Part number / Description
2330865-01 / Main reactor A412 frame assembly
2916177-01 / Reactor A412 top frame
2931303-01 / Reactor servo drive
2370387-01 / Reactor EMO / Motion
2931257-01 / BTC Box
2373718-01 / WTC Box
2909251-01 / R1 / R2 Controllers
2936550-01 / Reactor touchscreen
2327287-01 / Carousel bearing
2329999-01 / Carousel housing
2931222-01 / Carousel drive
2931109-01 / Reactor carousel
2379872-01 / Reactor fan
2936739-01 / A412 Gate valve
2997320-01 / Boat elevator A412
2972786-01 / Loader arm LP ROT
2936666-01 / O2 Analyzer reactor GEN
2366460-01 / N2 Purge generic
2330768-01 / TCU / TCF Generic
2330350-01 / VAC / PNEU Comp A412
Miscellaneous:
Part number / Description
2895587-01 / (2) End effectors 242 CER
2927772-01 / N2-Purge 200 SLM assembly
2927810-02 / Reactor O2 analyzer 120 VAC
2405067-01 / Door opener 2nd GEN IC
2888025-01 / Transponder
2356341-01 / Press sens WHR single
2356333-01 / Press sens RC car
Reactor chambers 1-2:
Part number / Description
2995905-01 / Reduced exhaust ATM kit
2842939-02 / Process tube ATM NQ thin kit
2897334-02 / Door plate ATM LT H2 SS
2845644-02 / Wafer carrier NQ ATM 300 mm
2805847-01 / Thermocouples ATM BC
2954664-01 / Mount block FLG'S
2869764-01 / FLGS Proc / Door ATM MK
2806096-01 / ATM Scavenger purge
2864282-02 / Outlet no QTZ ATM H2-cure kit
2894564-01 / Heat exchanger RC1 / RC2
2996235-01 / Klixon heater element
2953927-01 / Heat ELEM ATM FR LT
2836343-01 / ATM Exhaust RC1 / RC2 120 V
2301652-01 / ELEC FLG'S ATM A412
2866048-01 / Heater outlet ATM 24 V
2955644-01 / GASP H2 Cure RC 1/2
2907860-01 / Intermediate H2 Cure RC 1/2
2310953-02 / INC GASL RC 1/2 901300
2865262-01 / H2 Sensing RC1 / RC2
2332108-01 / Pump TCU
2862255-01 / O2-Analyzer ATM H2 cure RC 1/2.
ASM A 412 is an advanced thermal processing tool designed to uniformly heat diffusion substrates and related components. It can process substrates of up to six inches in diameter with an impressive Thermal Gradient of ±3°C. The heat is generated by long life tubular heating elements that are operated via independent energy control systems. The unit is equipped with heat-treating functions such as pre-treated heating, uniform soaking, curve-following heating, and cooling rate control. This equipment features a vacuum break, enabling the furnace to be evacuated in order to remove air or other gases from the substrate surface before diffusing takes place. The diffusion process occurs when the heating elements are energized, which raises the temperature of the furnace to a required set point. The substrate is then placed in the hot zone to expedite the diffusion process. The unit features a vertical loading design that provides quick and easy substrate access as well as a uniform temperature gradient throughout the furnace. It also features an air-cooling system integrated with the heating chamber, which helps to significantly reduce the diffusion time. Additionally, the unit includes an advanced graphite heater, which helps to maintain the required temperature uniformity. In order to ensure optimal safety levels, the unit also has an emergency switch. ASM A412 diffusion machine is an easy to use, reliable tool that can be used for a wide variety of diffusion procedures. Its flexibility makes it a great choice for those who need a fast, reliable and high-performance thermal processing asset. Its combination of features ensures great results making it a great choice for those in the diffusion processing business.
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