Used ASM A 412 #9114074 for sale

Name: ASM A 412
Brand: ASM
SKU: 9114074
Availability: SoldOut

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Diffusion Furnaces & Accessories

Manufacturer

ASM

Model

A 412

ID: 9114074

Wafer Size: 12"

LPCVD Vertical furnaces, 12" Process: PH3 Doped poly/LPCVD Software version: 6.80C Heater type: MRL Loader configuration, 4 or 5 loader: 4 Quartzware configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz (6) Adiabatic plate (1) SiH4, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L (1) O2, Type (L-type, Straight, Diffuser, Shower): Multihole, E (1) PH3, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L Vacuum line configuration Design: Original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting: 10(F/S) 1000 Torr Baratron model: MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control table Alarm watch/table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU: 0.7/0.7/30S C: 0.7/0.7/30S CL: 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3: N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7: SiH4: 2%/2%/10sec MFC8: 1%O2/Ar: 1%/1%/10sec MFC9: 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11: 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec Transfer table Wafer charge command (charge/discharge) Side dummy (5) Upper (10) Lower (100) Product (5) Monitor (105) Product & Monitor Time 2nd Charge time(min): 0 Wafer cool time(min): 20min Leak rate table Base pressure low Limit(Torr): 1% Base pressure High Limit(Torr): 1% Leak Check check time(s): 60s Leak limit(Torr): 1% Retry Limit(count): 2 Loadlock settings Loadlock configuration O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0 Process L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Ready L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Idle L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L L/A O2 limit (ppm): 10ppm.

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ASM A 412 is a single zone laboratory diffusion furnace and accompanying accessories, that provides high temperature processing capabilities used in the diffusion process. The diffusion process is used in a variety of industries including electronics, glass, powder metallurgy, and aerospace manufacturing. The furnace design consists of two main components; the bracket and the hearth. The primary purpose of the bracket is to hold the heating elements and provide insulation to the chamber. The hearth holds the process part, as well as a number of accessories that enable a variety of setup possibilities. The furnace is temperature-controlled via an adjustable temperature controller, and a manual lift. ASM A412 features a heating chamber with dimensions of 20 inches long by 7.5 inches wide and 7.5 inches deep. The chamber allows temperatures of up to 2000°F (1093°C) to be maintained for long periods of time. For efficient heat transfer and uniform heating, the chamber features a single heating coil that runs along the length of the chamber and is electrically powered. The heating elements are contained in a structure that provides efficient insulation. This greatly reduces heat loss and ensures more consistent temperatures throughout the chamber. A 412 furnace includes an electronic temperature controller, which allows the user to accurately monitor and adjust the temperature levels in the chamber. The controller can be set to a range of operating temperatures, and will automatically adjust the temperature inside the chamber to maintain a set temperature. The temperature controller also includes an over-temperature limit, as well as a built-in timer, so the furnace can be used safely and efficiently. In addition to the main oven chamber, A412 includes two additional accessory ports. The first port is used to connect external gases and/or vacuum lines, while the second port can be used to attach a tube furnace for preheating of materials. The ports are designed for the attachment of many different accessories, allowing more flexibility when using the furnace. In terms of usage, ASM A 412 is designed for manual and semi-automated operation. With its one-button press operation, ASM A412 can be quickly and easily setup for use, making it ideal for research or production runs. The furnace can be installed and operated with minimal effort, meaning that the diffusion process can be completed quickly and efficiently. Overall, A 412 is a single zone laboratory diffusion furnace and accompanying accessories, that provides high temperature processing capabilities used in the diffusion process. It features a limited lifetime warranty and is ideal for use in industrial, research, and educational facilities alike. With its simple design, intuitive user interface, and reliable performance, A412 is the perfect choice for any laboratory diffusion needs.