Used ASM A 412 #9170221 for sale

ASM A 412 is a diffusion furnace and accessories for semiconductor fabrication applications. It is designed for the diffusion of dopants into wafers. The equipment is equipped with a wide range of features to ensure efficient, safe and repeatable processing. The furnace chamber is made of high quality materials and contains a quartz tube, to protect against contamination during process cycles. It is heated by a four-zone, constant temperature vertical heating system. The four high-precision heater cartridges are controlled by independent, PID controller ensuring repeatable temperature accuracy (±0.01°C). It is also equipped with a cooled upper platen for uniform isothermal processing. ASM A412 features a powerful, automated end point detector that ensures accurate end point detection, eliminating potential flaws in the finished product. It also has an automated lifter platform with servo motor that ensures consistent loading and unloading of wafers. The electronic control panel provides all necessary information on operating parameters and safety, making the process completely straightforward and intuitive. A 412 also includes a robust vacuum unit. It is capable of maintaining low partial vacuum pressures in the diffusion chamber, allowing accurate and repeatable diffusion processes. The furnace accessories include an automated preview machine, a cooling and venting tool, and an inert purge asset. These components ensure proper and efficient operation of the furnace. A412 is constructed to deliver superior wafer uniformity and yield. Its sophisticated design and technology make it the perfect choice for high performance semiconductor fabrication processes. With its wide array of features, accurate and reliable performance, and easy maintenance, it is the ideal tool for your diffusion processes.