Used AGS LC-RIEL-HT #9182875 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Manufacturer
AGS
Model
LC-RIEL-HT
ID: 9182875
Wafer Size: 8"
Reactive ion etcher, 8" Assembly: Console Chamber Electrode, RIE10 with He BSC Vacuum, HT / CVG / TP4 Pressure control Plasma source, RF6 Power Interlocks Harness with serial IO Facilities Controller IG TCUX, 10-50C Toxic gas pod (4) 3x100sccm, 1x20sccm, MFC (Standard) (2) Toxics, MFC Loadlock Lifter Wafer clamp Wall heater Platen / Graphite Lecture bottle stick: (2) HBr, BCl3.
AGS LC-RIEL-HT is a precision speed etcher/ashers specifically designed for high-throughput, low-cost production applications. It is designed to quickly and efficiently remove material from a wide variety of substrates including metals, plastics, glass, ceramics, etc. LC-RIEL-HT is a low cost, high productivity solution. AGS LC-RIEL-HT has a power rating of up to 250W of pulsed plasma energy for precise control, making it ideal for applications where high accuracy and speed in etching is required. The plasma chamber design ensures uniform speed etching for consistent results and reduces the risk of uneven etching or burn-through of the substrate. The low-maintenance design of this equipment also saves time and money in upkeep. LC-RIEL-HT is very versatile and can be used with a wide range of materials and processes, including reactive ion etching (RIE), deep reactive ion etching (DRIE), wet etching, vapor phase etching (VPE), chemical mechanical polishing (CMP) and ion beam milling (IBM). It is also compatible with a variety of chemical etching solutions for different materials. The system also features advanced safety features, such as over-heat and power failure protection, to ensure safe operation. The chamber is designed to maintain low operating pressures, as well as provide excellent vacuum performance and contamination control. The etching unit also has an external safety switch to protect the operator, as well as an exothermic reaction warning. AGS LC-RIEL-HT features a powerful, easy-to-use control panel. This durable machine includes a touch-screen panel with easy-to-understand menu options and set up parameters for quick and accurate etching. It supports a variety of substrate sizes, allowing for flexibility in loading and unloading. In addition, the tool is designed with a removable chamber for easy cleaning and maintenance. LC-RIEL-HT is a reliable and cost-effective etching solution for a wide range of production applications that require precise speed etching. It offers fast and accurate etching, high throughput and low-cost operation. It is easy to operate and maintain, and is designed with advanced safety features to ensure operational safety.
There are no reviews yet