Used ALCATEL / ADIXEN / PFEIFFER 601E I-Speeder #165552 for sale

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ID: 165552
Wafer Size: 6"
Vintage: 2001
Silicon etcher, 6" Wafer size: 6", converted from 4" Semco ESC Genmark 4 robot with wafer aligner 4” single wafer vacuum loadlock assembly Chuck table with controlled-temperature from –30°C~ +60°C Substrate holder: 4” wafer electrostatic clamping system with center kit Low-pressure plasma source with laser view port adaptor on top of the source System control and monitoring with PLC & PC, Windows NT & Alcatel GUI UPS power for PLC control Operates the machine in manual, semi-automatic, or fully-automatic modes Chamber primary pump: ADP122 Cold trap with heated pump line Maglev turbomolecular pump: ATH 1300M DN 200 heated throttle & isolation valve VAT series 64 + By-pass + line with controller Loadlock dry pump ACP28 Loadlock molecular pump MDP 5011 Lauda Chiller RK8CP Power transformer: input AC200-220V, output AC400V Baratron 100Pa Source power supply: 2kW RF with RF20S generator controller Bias power supply: 500W with RF5S generator controller Robot loading version User’s manual on CD ROM and PC HD Electrical schematics on cleanroom paper Telediagnostic (modem+software) Process Module: Room (Bosch) temperature process. (including Bosch patent) Substrate holder electrostatic clamping system Wafer centering kit 100mm Source: 2kW RF Bias: 0.5kW RF Heated process chamber walls Laser view port adapter on top of the source Reactor Pumping: Alcatel ADP 122 Maglev turbomolecular pump ATH 1300M DN200 heated throttle & isolation valve VAT series 64 + by-pass Completed pumping line is heated, while a coldtrap is installed before the dry pump Gas lines: 4 UNIT mfc’s, type 1 gas lines, installed in the main frame of the A601E SF6-500 sccm, C4F8 – 200400 sccm, O2 –20 sccm, O2-200 sccm oad/Unload Module: Robot loading Optical fiber for wafer localization Ferrofluidics feedthrough on transfer arm Molecular drag pump MDP 5011 Mechanical pump needed Control Module: PLC & PC Windows NT & Alcatel GUI Telediagnostic(modem & software) Substrate holder: Electrostatic clamping system version Additional spare electrostatic ceramic (4”): yes, but used Pumping station: ADP122 and ACP28 dry pumps pack for process chamber and loadlock Gas lines: Gas cabinet for 6 gas lines Different UNIT MFC’s flow range/standard Transfer module and loadlock GENMARK cassette loading robot Flat finder/aligner Documentation: Hard copy of the user manual Documentation set on cleanroom paper CD-ROM with User manual Normal Paper: manuals of all sub-units Cleanroom Paper: Electrical diagrams Additional Parts: Cryo kit for Bosch and Cryo process Electrostatic Chuck 6” wafer size kit for manual or robot loading version Tool has been mainly used for R&D purposes Modifications: RK8CP chiller Upgrade of Maglev ATH 1300 to ATH 1600 turbomolecular pump Upgrade of ACP20 to ACP28 dry pump 51 foot pump cable Light tower Upgrade of 2 kW RFPP generator to ENI 3 kW RF generator UNIT MFC: SF6 / 1000 sccm UFC 180 SECS II protocol Software upgrade (PC and pLC) 2001 vintage.
ALCATEL / ADIXEN / PFEIFFER 601E I-Speeder is a high-performance etcher and asher designed for semiconductor and microelectronic applications. The equipment is designed to deliver superior performance and optimal throughput with feature sizes down to 2.5µm and processes that include etching, adhesion, cleaning, and removal. The I-Speeder is equipped with a reliable dual-beam system, offering pinpoint accuracy and uniformity across the entire workpiece. Its fluid resistivity and flexibility to accommodate multiple processes make it a versatile tool for most semiconductor requirements. The I-Speeder utilizes a specialized unit of advanced vacuum technologies to achieve superior Etch rates, lower particle counts, and reduced oxide contamination. The unit features a dual cycle controller, allowing for the precise adjustment of process parameters. The unique Combined Plasmer-Cone Machine and patented ceramic field coils help protect the workpiece while ensuring superior etching results. The I-Speeder is equipped with a total of eight pre-installed automated processes, providing consistent results and reduced operator training and setup time. This powerful unit is designed to permit the installation of third-party hardware and software without the need for additional hardware. Furthermore, it automatically logs detailed process parameters, making it simple to trace the etch process. The I-Speeder is a comprehensive etcher and asher solution with a wide array of features and benefits. It offers a powerful, efficient, and reliable process, resulting in superior microfeature formability and superior control. The versatile tool is ideal for most semiconductor etching requirements and delivers superior performance with feature sizes down to 2.5μm and faster process times. Furthermore, the unit is backed by both ADIXEN and ALCATEL, providing exceptional customer service and technical support.
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