Used ALCATEL / ADIXEN / PFEIFFER 601E I-Speeder #165552 for sale
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ID: 165552
Wafer Size: 6"
Vintage: 2001
Silicon etcher, 6"
Wafer size: 6", converted from 4"
Semco ESC
Genmark 4 robot with wafer aligner
4” single wafer vacuum loadlock assembly
Chuck table with controlled-temperature from –30°C~ +60°C
Substrate holder: 4” wafer electrostatic clamping system with center kit
Low-pressure plasma source with laser view port adaptor on top of the source
System control and monitoring with PLC & PC, Windows NT & Alcatel GUI
UPS power for PLC control
Operates the machine in manual, semi-automatic, or fully-automatic modes
Chamber primary pump: ADP122
Cold trap with heated pump line
Maglev turbomolecular pump: ATH 1300M
DN 200 heated throttle & isolation valve VAT series 64 + By-pass + line with controller
Loadlock dry pump ACP28
Loadlock molecular pump MDP 5011
Lauda Chiller RK8CP
Power transformer: input AC200-220V, output AC400V
Baratron 100Pa
Source power supply: 2kW RF with RF20S generator controller
Bias power supply: 500W with RF5S generator controller
Robot loading version
User’s manual on CD ROM and PC HD
Electrical schematics on cleanroom paper
Telediagnostic (modem+software)
Process Module:
Room (Bosch) temperature process. (including Bosch patent)
Substrate holder electrostatic clamping system
Wafer centering kit 100mm
Source: 2kW RF
Bias: 0.5kW RF
Heated process chamber walls
Laser view port adapter on top of the source
Reactor Pumping:
Alcatel ADP 122
Maglev turbomolecular pump ATH 1300M
DN200 heated throttle & isolation valve VAT series 64 + by-pass
Completed pumping line is heated, while a coldtrap is installed before the dry pump
Gas lines:
4 UNIT mfc’s, type 1 gas lines, installed in the main frame of the A601E
SF6-500 sccm, C4F8 – 200400 sccm, O2 –20 sccm, O2-200 sccm
oad/Unload Module:
Robot loading
Optical fiber for wafer localization
Ferrofluidics feedthrough on transfer arm
Molecular drag pump MDP 5011
Mechanical pump needed
Control Module:
PLC & PC
Windows NT & Alcatel GUI
Telediagnostic(modem & software)
Substrate holder:
Electrostatic clamping system version
Additional spare electrostatic ceramic (4”): yes, but used
Pumping station:
ADP122 and ACP28 dry pumps pack for process chamber and loadlock
Gas lines:
Gas cabinet for 6 gas lines
Different UNIT MFC’s flow range/standard
Transfer module and loadlock
GENMARK cassette loading robot
Flat finder/aligner
Documentation:
Hard copy of the user manual
Documentation set on cleanroom paper
CD-ROM with User manual
Normal Paper: manuals of all sub-units
Cleanroom Paper: Electrical diagrams
Additional Parts:
Cryo kit for Bosch and Cryo process
Electrostatic Chuck 6” wafer size kit for manual or robot loading version
Tool has been mainly used for R&D purposes
Modifications:
RK8CP chiller
Upgrade of Maglev ATH 1300 to ATH 1600 turbomolecular pump
Upgrade of ACP20 to ACP28 dry pump
51 foot pump cable
Light tower
Upgrade of 2 kW RFPP generator to ENI 3 kW RF generator
UNIT MFC: SF6 / 1000 sccm UFC 180
SECS II protocol
Software upgrade (PC and pLC)
2001 vintage.
ALCATEL / ADIXEN / PFEIFFER 601E I-Speeder is a high-performance etcher and asher designed for semiconductor and microelectronic applications. The equipment is designed to deliver superior performance and optimal throughput with feature sizes down to 2.5µm and processes that include etching, adhesion, cleaning, and removal. The I-Speeder is equipped with a reliable dual-beam system, offering pinpoint accuracy and uniformity across the entire workpiece. Its fluid resistivity and flexibility to accommodate multiple processes make it a versatile tool for most semiconductor requirements. The I-Speeder utilizes a specialized unit of advanced vacuum technologies to achieve superior Etch rates, lower particle counts, and reduced oxide contamination. The unit features a dual cycle controller, allowing for the precise adjustment of process parameters. The unique Combined Plasmer-Cone Machine and patented ceramic field coils help protect the workpiece while ensuring superior etching results. The I-Speeder is equipped with a total of eight pre-installed automated processes, providing consistent results and reduced operator training and setup time. This powerful unit is designed to permit the installation of third-party hardware and software without the need for additional hardware. Furthermore, it automatically logs detailed process parameters, making it simple to trace the etch process. The I-Speeder is a comprehensive etcher and asher solution with a wide array of features and benefits. It offers a powerful, efficient, and reliable process, resulting in superior microfeature formability and superior control. The versatile tool is ideal for most semiconductor etching requirements and delivers superior performance with feature sizes down to 2.5μm and faster process times. Furthermore, the unit is backed by both ADIXEN and ALCATEL, providing exceptional customer service and technical support.
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