Used ALCATEL / ADIXEN / PFEIFFER AMS 200 #9173294 for sale

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ID: 9173294
I- Speeder ESC with N2 liquid cooling SiO2 thin film etching, SiN, Si-DRIE, Pt sputter etching Manual load No atmospheric robot.
ALCATEL / ADIXEN / PFEIFFER AMS 200 etcher/asher is a precision tool used to etch or ash onto an substrate. ADIXEN AMS 200 is a fully automated systems combining pre-align and edge placement, etching and ashing technologies. It is a fully integrated solution for etching or ashing with unparalleled accuracy and repeatability. ALCATEL AMS 200 is equipped with a 500 watt Generator and a 70 mm Substrate Head capable of producing a 25 to 60 mm Substrate Placement accuracy. The Substrate Head is driven by a Sigma 5 PiezoMotor, a precision controller to ensure precise substrate placement and alignment. This ensures a tight level of accuracy and consistency across a range of substrates. PFEIFFER AMS 200 has an automated pre-align feature that aligns each Substrate to a predetermined or programmed starting point. Additionally to ensure tight tolerances, the pre-align software places the substrate head at a defined tight interval, typically, within 0.6mm. AMS 200 also features a high precision 600 Watt Focus Lens that provides an extremely uniform Gaussian beam profile for etching or ashing. The lens also allows for a variety of focal lengths to suit a variety of substrate sizes and materials. Additionally, the vertical height and angle of the lens can be adjusted to match the height of a substrate. ALCATEL / ADIXEN / PFEIFFER AMS 200 also includes a range of other features to help reduce substrate damage and allow for quick turnarounds. The machine runs in a semi-automatic mode, meaning the operator can work with the etcher during ashing or etching cycles. Additionally, adiabatic shielding is included on the substrate head to reduce temperature fluctuations and reduce potential damage during processing. In summary, ADIXEN AMS 200 provides users with a reliable and accurate system for etching or ashing onto a variety of surfaces. It combines pre-align and edge placement, etching and ashing technologies, a high precision Focus Lens, and other features. This makes ALCATEL AMS 200 a strong choice for precision etching or ashing applications.
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