Used ALCATEL / ADIXEN / PFEIFFER AMS 4200 #9123425 for sale

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ID: 9123425
Vintage: 2008
Etcher (1) Chamber Process: Deep silicon bosch SF6, C4F8, O2, Ar, N2, He, CHF3 Brooks platform Dual loadlocks Magnatron 7 ALCATEL ACT 600M TMP User interface PC Transfer PC Process chamber: AMS X200 ALCATEL ACT 1300M TMP Process gases: SF6 1000sccm C4F8 400sccm O2 100sccm O2 800sccm Ar 200sccm N2 1000sccm Ar CHF3 EDM CS200-11729 200 / 208VAC, 3 Phase, 50/60Hz ALCATEL AMS X200 (2) SEMCO HV52000C SEREN L301 RF Advanced energy dressler cesar RF ENI Spectrum B-3013 RF 200/208VAC, 3 Phase, 50/60Hz 2008 vintage.
ALCATEL / ADIXEN / PFEIFFER AMS 4200 is a high-tech etcher / asher designed to meet the needs of large-scale industrial production. This precise and fully automated equipment ensures an accurate, repeatable process for etching and ashing sample and substrates. The system features an integrated high-vacuum filtration unit to ensure cleanliness during etching and ashing. This filtration machine removes the most common contaminants from the gas flow and helps prevent the contamination of the sample. Additionally, the automated process is designed to protect the operator from the harmful effects of exposure to chemicals. ADIXEN AMS 4200 uses advanced technology to ensure a high-quality etch / ash process. The built-in multi-zone temperature control technology ensures precise temperature control in both the processing chamber and gas flow. This offers both accurate and repeatable etch/ash results. In addition, the user-friendly graphical user interface (GUI) makes the tool easy to use. ALCATEL AMS 4200 provides a user-friendly and intuitive interface that provides a clear overview of all the parameters related to the etch/ash process. This asset is also equipped with a variety of safety features. For example, the built-in emergency-stop mechanism ensures that the process is immediately stopped in case any safety-related problems occur. Overall, PFEIFFER AMS 4200 is a top-of-the-line etcher/asher. Its precision, automation, and safety features make it an ideal choice for large-scale industrial production. Its user-friendly GUI and robust safety features make it both safe and easy to use, making it a go-to product for etching and ashing.
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