Used ALCATEL / ADIXEN / PFEIFFER AMZ 200SE #140744 for sale

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ID: 140744
Wafer Size: 6"
Vintage: 2003
Deep reactive ion etcher, 6", 2003 vintage.
ALCATEL / ADIXEN / PFEIFFER AMZ 200SE is an etcher and asher that is designed for laboratory and industrial use. It is a self-contained instrument and is suitable for a variety of applications such as etching, deposition and micromachining. ADIXEN AMZ 200SE is constructed with a stainless steel chamber, which is efficiently vented and integrated with a digital vacuum control system. The chamber is also equipped with a liftable cover and a recessed window, which allows full view of the process. The chamber also has porous ceramic insulation allowing efficient thermal control, which is supplemented by forced air circulation within the chamber, designed to maximize temperature uniformity. The etcher/asher is fitted with a gas panel, containing a variety of gases, such as methane, SF6, and helium. Depending on the application, the user can easily vary the gas flow rates, pressure, and composition. Additionally, the integrated pulse power supply controls the power levels of the gases, allowing the user to easily adjust process parameters according to the specific requirements. ALCATEL AMZ 200SE has a user-friendly, easy to use operating software which is designed to improve productivity, while providing maximum process control. The software is programmed to monitor and control a range of process parameters such as process time, pressure and gas flow rates. It can also monitor pressure and react to any unplanned events, making it a reliable and stable system. AMZ 200SE is designed for maximum safety in the laboratory and industrial environments. The main safety features include a built-in emergency valve and a special mechanical seal ensuring that all dangerous gases are safely contained within the chamber and vented away from the user. PFEIFFER AMZ 200SE is a reliable and efficient etcher and asher and perfect for a variety of applications. It is suitable for precise and precise operation, with a variety of process parameters that can be easily adjusted and monitored. Such parameters include supply of gases, pressure, pulse power supply, and process time. ALCATEL / ADIXEN / PFEIFFER AMZ 200SE with its reliable and efficient features makes it suitable for both laboratory and industrial environment.
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