Used GASONICS / NOVELLUS Aura 1000 #9194328 for sale

GASONICS / NOVELLUS Aura 1000 is an industrial class etcher/ asher, designed for nano-patterning sensitive substrates. It utilizes a patented vacuum technology to enable precise control of etching rates, depth, uniformity and feature alignment from wafer batch to batch. The etcher/ asher is equipped with an ultra-high precise plasma source for precise etching of nanoscale patterns. The source utilizes ozone-free Helium gas and is capable of an etch rate of up to 20nm per minute. Due to its high precision, the unit can achieve feature sizes on the order of 2nm with a 0.02nm uniformity. It includes a full range of hardware and software features that are aimed at keeping the cost-of-ownership low and maximizing throughput. Power supplies include manual and remote control options. There is a choice of two substrate maps - manual and automatic - that allow users to select the exact features desired. GASONICS Aura 1000 is capable of carrying out complete tests, including etch rate and profile control. The options available to the user include film deposition, wafer imaging, pre-etch gas conditioning, and other cutting-edge options that allow for more precise etching of smaller features. The unit also has embedded process troubleshooting capabilities that can provide advice on improving the etching process. The unit comes with an intuitive and user-friendly graphical interface that provides an interactive environment for users to setup and monitor processes. NOVELLUS Aura 1000 also has a suite of diagnostic tools that allow users to diagnose and fix problems quickly. The unit also features quick-release robotics, which enable users to reload and unload wafers with minimal operator intervention. It also has support for a complete range of wafer shapes and sizes, allowing users to achieve the perfect patterning requirements. Overall, Aura 1000 is a powerful etching tool that is designed to provide users with world-class performance and reliability. It is designed for use in R&D and small-scale production environments, making it ideal for a variety of microelectronics applications.