Used MARCH AP 1000 #9172903 for sale

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Manufacturer
MARCH
Model
AP 1000
ID: 9172903
Vintage: 2016
Plasma cleaning system Currently installed 2016 vintage.
MARCH AP 1000 is a high-quality etchant and asher designed for the professional semiconductor manufacturing market. It is a fully automated and programmable platform, equipped with a wide range of advanced features to ensure consistent and high-quality processing. The etcher is equipped with an advanced vapor-phase etch technique, which provides high-quality etch rates. The platform is also equipped with an auto tuner, a safety equipment, and patented gas flow monitoring technology. The main function of the system is etching and ashing of wafers. The wafers are placed in a processing chamber and exposed to a combination of glow discharge plasma, low-pressure oxygen and other processing gases to achieve the desired etched pattern on the surface of the substrate. The machine also features a particle containment unit to protect the machine from unwanted particles. The etcher has an advanced RF generator, allowing for precise control of etching and ashing processes. The generator is capable of producing repeatable, high-frequency signals with a frequency range from 1MHz to 120MHz. It also features a voltage range from 5V to 1000V and can be set to a constant output, or ramped up or down in order to achieve an appropriate working level for the particular material being etched. The safety tool of MARCH AP1000 is an important feature, especially for applications with hazardous processes. It features an interlock asset to prevent unauthorized access, as well as an E-Stop that automatically shuts down the entire process if it detects unsafe conditions. The machine also has a status monitoring model which alerts the equipment operator when a certain process has been completed. AP-1000 is a reliable etcher and asher, suitable for production of a wide variety of semiconductor devices and components. It has a user-friendly interface and multiple levels of automation, enabling it to be used in large-scale batch production facilities. It can also be used for research and development, as it is highly configurable and can easily be adapted to new and challenging applications. AP1000 is a powerful, versatile and reliable device for any semiconductor fabrication environment.
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