Used MARCH INSTRUMENTS PX 1000 #9156928 for sale

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MARCH INSTRUMENTS PX 1000
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ID: 9156928
Plasma etcher/cleaner.
The MARCH MARCH INSTRUMENTS PX 1000 is an etcher / asher system that is designed to enable the production of substrate substrates with high-precision etching and undercutting characteristics. PX 1000 is well-suited to the semiconductor, display, and MEMS applications, due to its ability to offer precise control over etching processes, and the flexibility to etch smaller substrates to larger sizes. MARCH INSTRUMENTS PX 1000 utilizes LAM, or laser ablation machining. PX 1000 composes of a laser beam and a controlled, yet adjustable, substrate stage. This enables the etching process to be precisely completed, along with a claimed high throughput rate of up to 10,000 wafers per hour. MARCH INSTRUMENTS PX 1000 comes in two models: the S substrates version, and the T substrates version. The S substrates version is designed to etch substrates ranging from 350 um to 8 mm, while the T substrates version is designed for smaller substrates between 350 um to 4 mm. PX 1000 is equipped with wafer edge positioning technology which allows for accurate positioning of wafers relative to their center. This gives precise etching, and allows for wafers to be cut with optimal angular alignment. MARCH INSTRUMENTS PX 1000 also has an active substrate leveling capability which compensates for bow and tilt accurate to 5 micron within a limited area. PX 1000 is capable of delivering high photolithography accuracy with an angular etching tolerance as small as less than one degree. Thermal control of the wafer stage is also precise, with a temperature range of 15 to 25 Celsius. MARCH INSTRUMENTS PX 1000 is able to etch both quartz and glass substrates, and is 100% cleanroom compatible. Compliance to industry standards such as EMC & CE standards are met, and the machine is also compliant to environmental requirements such as RoHS. PX 1000 features a user-friendly interface, and includes diagnostics to enable operators to monitor the condition of the machine and determine any maintenance required. The system comes with onboard metrology software to maintain process control, as well as software for Wafer monitoring. The MARCH MARCH INSTRUMENTS PX 1000 is an etcher/asher system designed with precision and performance in mind. It offers high photolithography accuracy, precise thermal control, and wafer edge positioning capabilities. Additionally, it is easy to use, and meets industry standards, making it suitable for a variety of semiconductor, display, and MEMS applications.
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