Used MARCH PX-1000 #9021103 for sale

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Manufacturer
MARCH
Model
PX-1000
ID: 9021103
Plasma etcher Microprocessor control Advanced Energy model RFX-600 power controller.
MARCH PX-1000 is an etcher/asher designed for use in the fabrication of microelectronic devices. It is a fully automated equipment capable of etching, patterning, and cleaning substrates using a high-temperature plasma process. It is equipped with a range of features and capabilities that make it an ideal tool for etching and removing unwanted material from substrates. At its core, MARCH PX 1000 employs a high-temperature plasma etcher to create an inert environment that is ideal for the precision etching of microelectronic devices. The system is equipped with a number of interchangeable gas lines and sources, allowing for a range of substrate material compatibility and chamber pressures ranging from 0.13 mtorr up to 500 millitorr. Additionally, the unit boasts fast cycle times of approximately 45 to 60 seconds per wafer, making it capable of quickly etching and removing unwanted material from substrates in a time-efficient manner. PX-1000 also features an easy-to-use graphical user interface (GUI) that allows the user to access and control all of its features and functions with ease. It is equipped with a suite of features such as advanced process recipe editing and archiving, advanced transport/loading planning, and real-time monitoring that provide the user with total control and flexibility over each process step. Additionally, the machine features a revolutionary digital microwave plasma generator, which is designed to increase processing speeds dramatically while delivering precise optimized etching results with extremely precise repeatability. PX 1000 is also designed to exceed the demands of the rigorous environmental safety requirements of the semiconductor and associated industries. Thanks to its numerous safety features, a comprehensive understanding of the tool, and advanced engineering, MARCH PX-1000 is capable of meeting the needs of any microelectronic device fabrication application. In conclusion, MARCH PX 1000 is an advanced, fully-automated, high-temperature plasma etcher/asher asset that is well-suited for microelectronic device fabrication applications. Equipped with a number of features and capabilities, PX-1000 enables the etching and cleaning of substrates with fast cycle times and precise repeatability, as well as operator-friendly usability and advanced safety standards.
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