Used MARCH PX-1000 #9100080 for sale

MARCH PX-1000
Manufacturer
MARCH
Model
PX-1000
ID: 9100080
Plasma cleaners.
MARCH PX-1000 Asher/Etcher is a Class 10 cleanroom-compatible, high-yield, fully automated equipment used for both ashing (the removal of organic material) and etching (the removal of metallic material) of semiconductor wafers. MARCH PX 1000 is designed to clean wafers, making them ready for further fabrication steps. PX-1000 offers the highest throughput and cleanest processing available for advanced semiconductor device fabrication. PX 1000's unique chamber design rotates the wafer as a batch, evenly dispersing the chemicals across the wafer's surface, thus ensuring uniform uniform etching and ashing results. MARCH PX-1000 provides temperature control within a range of +-2°C to account for processing variations, while its proven flow control ensures even deposition of the chemicals onto the wafer. MARCH PX 1000 is equipped with a carrier load port which ensures cleanroom compatibility, and also allows the user to load up to eight cassettes in one time, greatly increasing the throughput of the system. In addition, the unit comes with a wafer-sensing switch which detects the presence of a wafer before the process sequence is initiated, and monitors the power and temperature settings during the etching/ashing process to ensure optimal results. PX-1000 also comes with an advanced precision timing mechanism and a sophisticated software package which ensures the etching/ashing process is accurately monitored for a quick and easy setup. PX 1000 offers precise temperature control which can be fine-tuned for enhanced etching/ashing, and will automatically shut down the process once the maximum number of etches/ashes has been obtained. Finally, MARCH PX-1000 Asher/Etcher is equipped with a number of safety features, including an aerial cooling machine which ensures the tool is safe to use even when working with flammable or combustible materials. This asset also offers flexible automation options to suit a range of analytical requirements, making it easy to tailor the model to the user's specific needs.
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