Used STS / CPX Multiplex #9087826 for sale
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ID: 9087826
ICP Etcher, 6"
Load lock Capability:3,4,5,6,8 inch
Pumps: not included
Helium Back side cooling
Generators : ENI ACG3 for Bias; ACG10 for Coils; VL400 Phase Shift Controller
STS AC Box
STS Purge Panel Assembly
Chiller: not included
Remote Gas control Gas Box with 5 gas line configuration:
SF6
C4F8
C4F8
O2
Ar.
STS / CPX Multiplex is an etcher/asher equipment that is capable of processing different types of materials in a single process. It is mainly used for etching and ashing of PCBs (Printed Circuit Boards), flat panel displays, thin films, and glass substrates. The etcher/asher system is built with an integrated platform that has two independent reactors, each with its own independent drive. The process of etching and ashing is controlled by individual, independently-controlled STS Multiplex drive systems. Each drive unit is configured with unique parameters specific to the process and material type being used. CPX Multiplex machine utilizes continuous plasma etching/ashing technology to achieve high etch and ash ratios with an excellent broadband etch/ash profile. The tool provides an adjustable range of etch and ash levels to achieve optimal results specific to the material being used. This etcher/asher asset is designed to be controlled through a PC for optimal performance. The control unit can be used to run multiple processes in parallel to save time in production runs. Multiplex is also capable of carrying out stencil etching and single-step passivation processes in one pass, which eliminates the need for separate etching and passivation processes. Stencil etching on this machine is achieved by using the LIDS-controlled plasma etching technique. The stencil etching process is capable of producing high aspect ratios and resolution, with smooth walls and no arcing. STS / CPX Multiplex is a reliable, high-speed, and highly-efficient etcher/asher platform. It is equipped with various safety features, including open-top design, interlocks, temperature monitoring, and overpressure alarms. STS Multiplex systems are manufactured with strict quality control to provide quick turnarounds, high reliability, and great performance. They are designed to provide years of reliable service, making them ideal for a variety of applications and industries.
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