Used AUTOMATECH Altix #9195164 for sale

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Manufacturer
AUTOMATECH
Model
Altix
ID: 9195164
Vintage: 2015
UV Exposure systems 1 Phase 2015 vintage.
AUTOMATECH Altix is a high-performance automated exposure equipment specifically designed for semiconductor wafer processing. The system is equipped with an optimized high-precision translation stage to create complex three-dimensional structures to precise accuracies without the need for manual or direct operator intervention. Altix boasts fully variable exposure settings for maximum flexibility while producing consistent results and excellent line sharpness. Its patented self-loading mechanism is designed to reduce exposure time and minimize the risk of damage. AUTOMATECH Altix's optical unit is low maintenance and ensures excellent uniformity of light output over a wide range of operating conditions. The machine has a wide range of spatial frequencies and angular resolutions - from 0.2 µm to 0.95 µm for broadband spectral exposures and 0.85 µm to 10.5 µm for bandlimited exposures. This allows operators to precisely and accurately control the energy and position of individual exposures. The exposure tool is intuitive and easy-to-use, with multiple operating modes and a user-friendly graphical user interface. It is also capable of Ethernet and IEEE-1394 network communication and can be integrated into automated production systems. The asset includes pre-stored mask patterns for higher productivity and has a high-performance CCD camera for direct feedback and evaluation of masks and resist images. Altix has a compact design with a small footprint which allows for easy integration into existing production systems. It requires minimal supervision to maximize productivity and can be programmed to work in automated processes. Additionally, due to its proprietary air bearing design, this model can be applied to a wide variety of substrates without drying or cleaning. AUTOMATECH Altix is ideal for processing a variety of substrates with diverse applications including etching, deposition, and partial wafer fabrication. The highly precise exposures and excellent quality of results make it suitable for use in advanced, high-end semiconductor production processes. Overall, Altix is the perfect solution for those who require exceptional results, and demand high reliability, accuracy, and speed.
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