Used AXCELIS / FUSION 200 PCU #9194479 for sale

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AXCELIS / FUSION 200 PCU
Sold
ID: 9194479
Wafer Size: 8"
UV Cure system, 8".
AXCELIS / FUSION 200 PCU (Personal Computer Unit) is an exposure equipment designed for several different lithography operations. It is used for exposure control, etch/develop control and mask aligners. The PCU is a stand-alone system that is connected to many pieces of lithography equipment and components. The unit consists of several components, including a workstation, a controller, a power supply, a mainframe, and a software package. The workstation serves as the user interface and the controller is responsible for the process control. The power supply provides the power for the machine and the mainframe houses all of the tool's circuitry. The software package provides a platform for users to input parameters, execute commands, and receive reports. FUSION 200 PCU features a color touchscreen display, a 5" high resolution display and a multi-keyboard for easy data entry. It also has a large database to store up to 10,000 masks and alignment data. The asset also supports multiple communication protocols that can be customized by the user. This model is capable of providing expose parameters such as exposure time, illumination patterns, focus, dark exposure, polarization and exposure correction. It has an ultra-fast response time and is capable of controlling multiple wafer exposures simultaneously. The equipment also offers an advanced mask database search function, which can be used to retrieve mask sets that meet specific requirements. It is also capable of monitoring in-house process parameters and can be extended to manage external systems. The system has a variety of diagnostic tools to assist in managing the performance and alignment of the unit. It can store up to 10,000 parameters to be monitored, including focus error, exposure timing, polarization, calibration and temperature. It also has an automatic focus calibration feature which ensures that the machine is always at its best performance. AXCELIS 200PCU is a powerful exposure tool that is designed to help users execute several lithography operations. It has a variety of features, from a touchscreen display to a comprehensive database, that makes it an ideal solution for advanced exposure requirements.
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