Used AMAT / APPLIED MATERIALS Solion XP #9171473 for sale

AMAT / APPLIED MATERIALS Solion XP is an ion implanter and monitor that allows for improved process control and more efficient implantation. It utilizes a patented wide-scanning horizontal magnetron ion source that keeps a stable output range throughout the entire implant range resulting in mroe consistent dose control. AMAT Solion XP is ideal for multiple-depletion and high-dose-rate systems, as well as continuous-variable-dose-rate applications. The equipment also allows for multiple ion dose applications, allowing for accurate dose rates and uniformity. APPLIED MATERIALS Solion XP's automated control features include beam characterization monitors for assessing beam characteristics, including beam quality, contamination level, and beam profile. A beam-current monitoring system allows for precise control of the implant dosage when implanting at rates from 0.2 nano-Ampers/ cm2 to higher currents. With these sensors, Solion XP can automatically compile a set of beam parameters such as deflector setting, beam current, and beam-emission intensity. The ion implanter utilizes an advanced beam-sweeping unit and multiple-axis deflector for improved uniformity. For improved safety, AMAT / APPLIED MATERIALS Solion XP uses an emergency stop and fail-safe machine to shut off the beam in the event of an emergency. It also has an internal vacuum pump that helps to reduce contamination levels. As an additional security feature, AMAT Solion XP includes an optical interlock tool that shuts the beam off if the cabinet is opened. APPLIED MATERIALS Solion XP includes a full range of automatic temperature and pressure control systems, including a PID-controlled heater, auto-zero pressure regulator, and temperature controller. A gas-flow control asset allows for improved precision when implanting heavy elements and maintains the beam over extended implant times. Apart from its ion implanting capabilities, Solion XP includes additional features that further enhance its process control and productivity. A nuclear-monitoring model is integrated with radiation shielding and safety mechanisms to detect low-energy-x-ray radiation. Additionally, AMAT / APPLIED MATERIALS Solion XP provides diagnostic capabilities for assessing the performance of chamber components and assessing implant quality and uniformity. An RF-monitoring equipment, which is tightly coupled with the beam-monitoring systems, monitors implanted-energy levels, while a real-time-data logging system and batch-memory-recording unit ensure that all implantation parameters are accurately logged. Overall, the advanced features of AMAT Solion XP make it an ideal choice for improving dose control, uniformity, and safety during ion implantation.