Used EATON NOVA / AXCELIS NV 10-160 #149571 for sale

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ID: 149571
High current ion implanters, 4"-6", missing parts 160 kV Includes: (2) Disks (1) Complete Ion Source (2) Cryo 10 (1) Diffusion Pump (3) Mechanical Pumps Computer and Custom Tables Spare assemblies Does not includes AT-4 loader De-installed.
EATON NOVA / AXCELIS NV 10-160 is an advanced ion implanter and process monitor designed for implantation of a variety of materials into a variety of substrates and other surfaces. It is able to provide accurate and reliable data over a range of implant conditions and to ensure consistent implant quality.The equipment consists of an ion source, power supply and monitor, which provide the user with a comprehensive ion beam processing solution. The ion implanter is powered with an AC/DC supply, which provides a range of functioning voltages from 0 to 10kV. This is coupled with a patented "Charge Neutralization System", which ensures that no unintended electrostatic charges are left on the substrate after implantation, thus reducing the risk of defects or material residues. The unit is also equipped with a high pressure argon chamber, allowing for higher implant doses and improved uniformity. The monitor is designed to provide real-time implantation parameters and is capable of displaying up to-the-minute implantation information. This allows for quick and effective optimization of the implant process. Additionally, the monitor is also integrated with a statistical process control (SPC) machine, which records results over time to allow users to understand long-term trends and make adjustments accordingly. AXCELIS NV10-160 is one of the most advanced ion implanters and process monitors on the market. It offers exceptional control over the implantation process, helping to ensure consistent and reliable results. Implementing this tool into your process could help to reduce defect rates, ultimately resulting in improved production and cost savings.
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