Used THERMA-WAVE DT-360 #9126377 for sale

THERMA-WAVE DT-360 is a high-end ion implanter and monitor designed to maximize the efficiency of ion implantation processes. It is primarily used in the semiconductor and microelectronic industries. DT-360 provides a highly efficient, precise, and cost-effective ion implantation solution. THERMA-WAVE DT-360 is designed to meet the demanding needs of ion implantation processes. It is capable of delivering up to eight different options for beam injection, ranging from high-energy to low-energy beams. This allows DT-360 to achieve a wide range of implantation depths. It also offers adjustable beam size, which enables a range of doping or regions to be created. THERMA-WAVE DT-360 also features an Ion Monitor equipment, which allows for precise measurement and control of the implant parameters. The user can monitor the beam size, current, voltage, chamber gas, temperature, implant time, and beam charge levels. This allows for more consistent results and precise control of the implant profile. DT-360 also offers high throughput speeds, which enables faster and more efficient implantations. This makes THERMA-WAVE DT-360 an ideal choice for processes that require a high level of precision along with a high throughput speed. In addition, DT-360 has a built-in data logging system which can log up to 500 runs. This data logging unit helps provide a comprehensive record of all implantations performed. The data can be analyzed to provide insights into the ion implanter's performance and to determine which processes are most efficient. THERMA-WAVE DT-360 is also equipped with safety features. It has a built-in gas scrubber, which removes unwanted particles from the chamber. It also has an emergency power off switch, which instantly shuts off the entire machine in case of an emergency. Overall, DT-360 is a highly advanced and reliable ion implanter and monitor designed to meet the demands of ion implantation processes. Its adjustable beam size, built-in monitor tool, high throughput speeds, and safety features make it an ideal choice for demanding and precise processes.